SMC Corporation of America
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(at 25C water) Temperature characteristics 5% F.S. (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for monitor unit PF2D 300/301 (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Pulse output Output Voltage output Note 5) 1 to 5 V Accuracy: 2% F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog specifications Current output Note

Externally set input impedance 100 k or more Externally set input voltage 0 to 5 V 1 8 External potentiometer 10 k ( W or more): not provided Step response 0.06 s or less (1 A, 95%) Dither frequency adjustable range (DITHER) 120 to 180 Hz (140 Hz when delivered) 0 to 500 mA (0 mA when delivered) Zero adjustable range (NULL) 500 mA to 1 A for input voltage 5 V (1 A when delivered) Gain adjustable

(MPa) : Fluid temperature (C) S : Effective area (mm2) Cv : Cv factor (/) 4.1-70 VXA31/32 Dimensions VX VNl VQ With bracket K 6 7.5 Symbol Model Port size P Rc(PT) , , A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil

Operation t 0 Single Acting 03 10kgrf/crn'z 04 4kgt'lcm2 06 6kgrf/cnf 11 30psi 12 45 psi 13 150 psi 22 200 kPa 23 300 kPa 24 400kPa 26 600 kPa 41 30 psi & 2 k$l cm2 stainless steel t42 60psi& 4 k$lcm2 stainless steel 43 100 psi & 7 k$lcm2 stainless steel NIL PT Thread PF Parallel Pipe Thread t NPT American National Standard Pipe Thread Accessoriee t NIL Standard Lever Control Lengrth (0.25

Operation t 0 Single Acting 03 10kgrf/crn'z 04 4kgt'lcm2 06 6kgrf/cnf 11 30psi 12 45 psi 13 150 psi 22 200 kPa 23 300 kPa 24 400kPa 26 600 kPa 41 30 psi & 2 k$l cm2 stainless steel t42 60psi& 4 k$lcm2 stainless steel 43 100 psi & 7 k$lcm2 stainless steel NIL PT Thread PF Parallel Pipe Thread t NPT American National Standard Pipe Thread Accessoriee t NIL Standard Lever Control Lengrth (0.25

~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Brown Brown Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Power supply is 24 VDC Internal voltage drop in switch is 4 V. Example: Load impedance is 3 k.

Extend upward from 300 mm/s on the horizontal axis of the graph to the intersection point with the line for a tube bore size of 50 mm, and then extend leftward from this point to find the load of 40 kg. 4 JMB Series Dimensions Basic: JMDBB MM Width across flats KA 2 x P (Rc, NPT, G) 4 x J G G D E B C H1 AL A N F H ZZ + Stroke S + Stroke N M K B C B1 Dimensions [mm] Bore size Stroke range

How to Find the Flow Rate (at air temperature of 20C) Choke flow: when (P2 + 0.1)/(P1 + 0.1) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t : Air temperature Note) Formulas above apply

S A93 MGT Table unit switch quantity Cylinder with turntable Table unit auto switch type S 1 pc.

Brown Brown Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Power supply is 24 VDC Internal voltage drop in switch is 4 V. Example: Load impedance is 3 k.

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

S A93 MGT MY Table unit/ Number of auto switches CY Table unit/ Auto switch S 1 pc.

CRBU Basic (Side port) CRB1FW Basic (Axial direction port) CRB1FW W/ angle adjuster CRB1FWU W/ auto switch CDRB1FW W/ angle adjuster and auto switch CDRB1FWU Size Size Size Size Size Angle , #11 (#1+#11) , #12 (#3+#12) , #13 (#5+#13) , #14 (#7+#14) , #15 (#9+#15) S SCRB SE SCRB S SCRB S SCRB S SCRB Size Size Size Size Size Angle Angle CRA1 Angle Angle CRQ Ass'y Part Number: P211070

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output for display unit Output Note 2) specifications Voltage output 1 to 5 V Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.

wire length 3m Without lead wires C CL CN Switch type Body type Without 1 point setting/analog output 3 rotations, NPN output T14 For single type Common SUP for manifold Individual SUP for manifold 1 3 5 Without 1 point setting/analog output 3 rotations, PNP output T54 Rated voltage Standard supply pressure 5 24VDC 0.5MPa 0.35MPa 0.45MPa H M S Valve K Air supply valve/Vacuum release valve

54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 26 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control.

54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 25 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control.