MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Speed Controller with Indicator

: Universal Type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread AS-FS AS-FSG Uni-AS-FS r !

CEx-OMB0060

Command Command Check sum code data Command data details 0 0: Phase difference input of A and B phases 1: Individual input of UP/ DOWN Response Block # 0 0 I W [CR] Unit No. Command Status Check sum code Reading count backup setting Command Block # 0 0 B R [CR] Unit No. Command Check sum code Response Block # 0 0 B R [CR] Unit No.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Dimensions Manifold type (without PD port) ZZQ1 -B2B-X125 ZQ1 3M(-Q) 2 x Rc 1/4 EXH. port PE P 8 P PE 62 13 Space Saving Vacuum Ejector Series ZQ Manifold Exploded View e y r b y y r y a) part b) view t w a) part t q a) part t Part no. Component Parts Description No. Hexagon socket head cap screw End block L End block R 1 2 3 Refer to How to Order below.

Electric Actuators

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Electric Rotary Table

Sphere Position of rotation shaft: Diameter a b r r r = m 12 a2 + b2 = m 2 r2 = m 5 2r2 = m 4 r2 9. When a load is mounted on the end of the lever 10. Gear transmission (B) (A) Number of teeth = a r a2 a1 1. Find the moment of inertia B for the rotation of shaft (B). 2. Then, replace the moment of inertia B around the shaft (A) by A, m2 + m2a22 + K 3 a12 = m1 m1 (Ex.)

PA300/500/700

(Value in the initial stage) Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) (1) Port size Weight (kg) Series Model C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv b Cv b Cv b Cv VPA342 (Body ported) 3.3 4.0 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 0.93 1.1 0.89/0.89 1.0/0.95 2.0 2.5

CEx-OMI0064

0: 1: # 0 0 O W [CR] No. 0 0: 1: # 0 0 O W [CR] No. 33 - # 0 0 I R [CR] No. # 0 0 I R [CR] No. 0 0:A /B 1:UP/DOWN # 0 0 I W [CR] No. 0 0:A /B 1:UP/DOWN # 0 0 I W [CR] No. 34 - # 0 0 B R [CR] No. # 0 0 B R [CR] No. 0 0:OFF 1:ON # 0 0 B W [CR] No. 0 0:OFF 1:ON # 0 0 B W [CR] No. 35 - # 0 0 R S [CR] No. # 0 0 R S [CR] No. # 0 0 H R [CR] No. # 0 0 H R [CR] No. # 0 0 T S [CR

39

300.025 250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 NAAMS code ACA031M ACA032M ACA033M ACA034M ACA035M ACA036M NAAMS code ACA043M ACA044M ACA045M ACA046M ACA047M ACA048M A B C D E F G H I J A B C D E F G H I J Part no.

C95

R CJ2 SW1 EE EE KK KK CM2 WA B D E B D ??

Floating Joint

Flange Type: JAF JAF180 200--X530 4 x J Center of sphere M U U D 60 G P T B C H R A Dimensions (mm) Maximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C D T J G H Weight (kg) Nominal size Pitch 180 JAF180-40-150-X530 40 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.1 200 JAF200-45-150-

CLA

dod, ZOl'ler 0I0de '--c:::=~J_~ Blue t-)(b!ack) 0-A54, D-B54, D-A44(C), D-A34(C) 0-A67 Zener <;Siode Reed SWitch , Blue b_ ~ue a, (black) <'ad) H Surge ab$Ol'bef D-A56 D-A33(C) :R~ ~tC h ---R;~~~r-: I-) ~: ( ';' ) L 0 ' , ' : Zener diode : ,--_.

HEC_001W-E

After the error is reset, the indication of [WRN] disappears. 8-1 Alarm 8.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.8-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.8-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C

E-P HYREG

B VVEX 1 5 01 Body size Pilot type Valve stations Port size 1 22 Note 1) 2 stations 1(P), 3(R) 2(A) Internal pilot Ex.) VVEX2-2-5-02 VY1200-00-G 4 pcs.

Electric Actuator

LE-CSM-R;; is MR-PWS1CBL;M-A;-H manufactured by Mitsubishi Electric. LE-CSB-R;; is MR-BKS1CBL;M-A;-H manufactured by Mitsubishi Electric.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

PFxx-OMX0007

(Page 47) 7100 0x1BBC 0 R Analogue output value U16 N 0x0 to 0x0BB8 (0 to 3000) Analogue output type only Refer to "Inclination and intercept to the unit specification" (Page 38) Inclination of flow rate PD a F32 N 8000 0x1F40 0 R Measurement related Refer to "Inclination and intercept to the unit specification" (Page 38) 8010 0x1F4A 0 R Flow rate PD intercept b F32 N 8020 0x1F54 0 R Flow

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

B 89 A A B Section BB Coupling P.C.D.