MTS

Refer to graph (16) based on horizontal mounting, the maximum speed of 600 mm/s, and 125 stroke.

VCB

R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18

IDX-OM-V020

IDX-OM-V020 Original Instructions PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFA60-23-A,C,L,R,T,V IDFA70-23-A,C,L,R,T,V IDFA80-23-A,C,L,R,T,V IDFA90-23-A,C,L,R,T,V This manual is intended to explain the installation and operation of the product.

5 Port Air Operated Valve

5 (R) , 3 (R) port 3/8 1 (P) port 3/8 VFA520 VV5FA5-21 4 (A), 2 (B) port 5 (R) , 3 (R) port 1/2 Common EXH 2 to 15 stations 1 (P) port 1/2 VFA3000 VV5FA3-40 5 (R) , 3 (R) port 1/4 Common EXH 2 to 20 stations VFA340 1 (P) port 1/4 4 (A) , 2 (B) port 1/4 P.1518 VFA5000 VV5FA5-40 5 (R) , 3 (R) port 3/8 Common EXH 2 to 10 stations VFA544 1 (P) port 3/8 4 (A) , 2 (B) port 1/4 1497 5 Port Air

Rotary Cylinder Series MRQ Size: 32, 40 1

of an isometric acceleration movement. 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Rotation time (s/90) Moment of inertia0.0025 kgm2 Rotation time0.7 s/90, size 40 will be selected.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

0 100 200 300 400 500 280 560 Data 10 4 8 7 6 5 MXY12 3 2.0 Shock absorber Rubber stopper screw 2 4 Load weight W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

One-touch Fittings

S 1 4, 6 (Oval type release button) Oval type release button KQ2 8 to 16 H 08 01 G S (Round type release button) Male thread seal method Symbol Seal method Nil Without sealant S With sealant Model Thread material: Stainless steel 303 One-touch fittings Port size/Applicable tubing O.D.

CM2

13 5.5 19.5 8 M10 X 1.25 45 15 34.5 32 M26 X 1.5 26 22 41 8 10 14 46.5 24 16 7 21 11 M14 X 1.5 50 21.5 42.5 40 M32 X 2 32 Dimensions by stroke Boss-cut style (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ S ZZ S ZZ ZZ ZZ ZZ ZZ ZZ Bore Bore 87 141 112 166 137 191 20 20 128 153 178

MXS

6 CL MLGC r CNA !2 !3 t !

Compact Guide Cylinder

Max. speed Up to 300 mm/s Up to 400 mm/s Up to 500 mm/s Coefficient 1.7 1 0.6 10 MGPK Series L L m m Plate Material Carbon Steel /MGPKM Vertical Mounting Operating pressure: 0.5 MPa or more Operating pressure: 0.4 MPa MGPKFM12 to 50 50 mm stroke or less, V = 200 mm/s or less Over 50 mm stroke, V = 200 mm/s or less 100 100 50 50 40 40 32 32 10 10 25 25 Load mass m [kg] Load mass m [kg] 20

VP300/500/700

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

4/5 Port Air Operated Valve SYJA3000 Series

SYJ7000-21-1A 1 pc. 5(R) 1 (P) (R)3 5(R) 1 (P) (R)3 3 position pressure center 4(A) (B)2 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 5(R) 1 (P) (R)3 Caution Be sure to read this before handling the products.

LEF-OM006xx

20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Assembly 1) Terminal box e connected with housing r should be reinstated.

NCA1

LR DD E R F M FL Dimensions Part No.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg m s m s Type of impact s m 1 m 2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with the

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V