CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

MY1

Operating temperature range 5 to 60C (41 to 140F) Lock specifications Standard strokes Maximum manufacturable stroke (mm) 25 Bore size (mm) 16 20 32 40 Standard stroke (mm) Bore size (mm) One side (selectable), Both sides Lock position 50, 100, 150, 200 250, 300, 350, 400 450, 500, 550, 600 10, 16, 20 270 (60.7) 110 (24.7) 450 (101.2) 700 (157.4) Holding force (max.)

REC

20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204 M10 x 1.25 6 8 37.5 5.5

ISO Cylinder

Weights [g] Bore size [mm] 8 10 12 16 20 25 C85KN 39 41 82 95 189 257 C85KE 41 43 86 98 194 262 Without magnet C85KF 37 39 77 85 174 240 C85KY 37 39 77 85 175 241 Basic weight CD85KN 39 41 83 95 193 261 CD85KE 41 43 86 99 198 266 With magnet CD85KF 37 39 77 85 178 244 CD85KY 37 39 78 85 178 245 Additional weight per 10 mm of stroke 2.3 2.5 4.5 5.5 8.7 12.2 Foot (1 pc.)

REC

150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8 37.5 5.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model no. of switch rail accessory is listed on pages 8-15-32 and 8-15-41.

CHKD/CHKG

Bore size (mm) 30 d 20 NTH-020 13 15 M8 x 1 12.5 5 20 NTH-025 17 19.6 M10 x 1.25 16.5 6 25 NTH-032 19 21.9 M12 x 1.25 18 7 32 NTH-040 22 25.4 M16 x 1.5 21 10 D C 40 NTH-050 27 31.2 M20 x 1.5 26 12 50 NTH-060 32 37 M24 x 1.5 31 14 63 NTH-080 41 47.3 M30 x 1.5 40 17 H B 80 NTH-100 55 63.5 M39 x 1.5 54 20 100 NTH-125 70 80.8 M48 x 1.5 69 26 Note) There may be a slight difference between the

CLS

46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42 25 31 41 M18 x 1.5 M40 x 1.5 204 106 36 167 195 162 18.5 149 86 135 35 Up to 1200 M12 x 1.75 118 226 124 40.5 187 216 182 18.5 165 97 135 M20 x 1.5

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

MXQ

42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

C76

XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore CZ XB 47 57 XC AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 12 0.032 0.059 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CE CG 41

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

63 103 154 3.5 Model ZPX63HJ25-01-A18 ZPX63HJ50-01-A18 ZPX63HJ75-01-A18 ZPX80HJ25-01-A18 ZPX80HJ50-01-A18 ZPX80HJ75-01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-01-A18 52 171 222 80 82 16.5 28 43

C76

XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 12 0.032 0.059 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CZ XB 47 57 XC CE CG 41

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

KA M D MM E EA F FA G J N P S (mm) 125 140 160 180 200 250 300 1/2 Up to 1000 M14 x 1.5 M30 x 1.5 50 47 15 145 31 115 27 36 90 59 43 14 16 35 98 Lube Non-lube Air-hydro 1/2 Up to 1000 M14 x 1.5 M30 x 1.5 50 47 161 15 31 128 36 27 90 59 43 14 16 35 98 3/4 Up to 1200 M16 x 1.5 M36 x 1.5 56 53 182 17 36 144 30.5 40 90 59 43 14 18.5 39 106 3/4 Up to 1200 M18 x 1.5 M40 x 1.5 63 60 20 204 162 41

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121