Digital Flow Switches Series PF2A

rate measurement range l/min Integrated type Display unit Display unit (4ch) Sensor unit PF2W504(T) PF2W520(T) PF2W540(T) PF2W511 PF2W704(T) PF2W720(T) PF2W740(T) PF2W711 0.5 to 4 2 to 16 5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

IDX-OM-O004C

1.25mm 2 () () 14 2 14.T 14.5 IDF15E1-10-T IDF15E1-20-T 2 1 L N TB PE 3 L N PE 1 2 3 TB MC TDR MC TDR ILS ILS MC MC TDR TDR PTC PTC OLR OLR MC MC CM CM C01 C02 MC MC C11 C11 FM FM PRS PRS P P TDR MC TDR MC CM PTC PTC C01 FM PRS C02 OLR TB C11 ILS TDR MC 14 3

,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

AMP

P-80 (YG)

SYJ300-OMU0003

No.SYJ300-OMU0003 -2- / *3) 1 1.5 *3)1 1 () No.SYJ300-OMU0003 -3- SYJ Series 3 / 1 DC () () () () EXH () () 4 No.SYJ300-OMU0003 SYJ Series 3 / ( ) 1 ( ),COMCOM 2 C-R () C-R Sol.1: DC 3% AC 8% Sol.2: (SSR)AC 1) (C-R) OFF 2) () 1.NPN 3) AC,, , SSR SSR 1) Sol.1: Sol.2: 2) ,1V + 2.NPN 5 No.SYJ300-OMU0003 SYJ Series 3 / 1 -10 1)M5 M3 1/4 0.4~0.5Nm M5 1/6~1/4 1~1.5Nm ()

,

3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01 Sub-plate Thread type Size Rc Nil F T 01 02 Size 01 G Size 02 NPTF Port size Symbol A01 A02 Piping specifications Size 02 Size 01 Side-ported 1/8 Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2

3 Way Direct Acting NVKF 300 Series

(AC24V) Bdy potted vKF300.11A.1 (With bracket) M5) (Manifold only) ,_Without subplate 01T 1/s NPTF subplate Indicator light / Surge voltage suppressor 'S With surge voltage supprdssor 7 With indicalor light and surge voltage suppressor (D type only) " Special order * Z oplion is not available wilh grommel. ' Special ofcler Construction / Parts List Symbol . .rf--rF t / V \ I ] \ N L I T I

NVKF

(AC24V) Bdy potted vKF300.11A.1 (With bracket) M5) (Manifold only) ,_Without subplate 01T 1/s NPTF subplate Indicator light / Surge voltage suppressor 'S With surge voltage supprdssor 7 With indicalor light and surge voltage suppressor (D type only) " Special order * Z oplion is not available wilh grommel. ' Special ofcler Construction / Parts List Symbol . .rf--rF t / V \ I ] \ N L I T I

IDX-OM-W032

(1 ) 2. 3. 0 IDFA Series 9-3 (ADH4000-04) 9 2 IDX-OM-W032 10 R 10 R 10-1 10-2 IDFA22E/37E/55E-23-R 10A 30mA IDFA75E-23-R 20A 30mA 10-3 (IDFA55E,75E) (IDFA55E,75E) M5 9.5mm 2 1.25mm L ,N N L () () IDFA Series 10-3 10-1 IDX-OM-W032 10 R 10-4 () () ONOFF 10-5 R 6-4 6-3 T 11-6 11-3 IDFA Series 10-4 10-2 IDX-OM-W032 11 T 11 T T 11-211-3 11-1 1. 2. 3.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01 Sub-plate Thread type Size Rc Nil F T 01 02 Size 01 G Size 02 NPTF Port size Symbol A01 A02 Piping specifications Size 02 Size 01 Side-ported 1/8 Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2

RB/RBL/RBQ

S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.

Air Cylinder RSQ Series Stopper Cylinder

lhe sme a th drawings bdow Stroke adjusting shock absorber P s t H EEI o 6ll Bore size @ZRS nQ n32-tlllB 2.18 20 il 120.5 + 2 slrokes Bore size O4O, 50/RSfOlS-nLJB F 2-1tA o *14 *13.5 o2O > H 4dj!

FSQ seies

lhe sme a th drawings bdow Stroke adjusting shock absorber P s t H EEI o 6ll Bore size @ZRS nQ n32-tlllB 2.18 20 il 120.5 + 2 slrokes Bore size O4O, 50/RSfOlS-nLJB F 2-1tA o *14 *13.5 o2O > H 4dj!

240

8 4 x M5 x 0.8 Depth 11 2 x M5 x 0.8 Cylinder port MXJ 4 x M5 x 0.8 Depth 8 6.5 34 6 MXP 24.5 34 63.5 64.5 MXY MTS 32 7 32 7 34 6 6 NS 52.5 + Stroke 68 + Stroke 32 20 11 15.5 20 15 10 + Stroke 15 4 x M5 x 0.8 Depth 8 20 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)], Operation Manual: T (w/o Operation Manual, Calibration Certificate)

energy saving effect

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 163 C O N T E N T S HRSH Series Inverter Type HRS HRS

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.