Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 4 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: A (Air Filter w/Auto Drain, Regulator, Air Release Valve), Voltage of Air Release Valve: 5 (24VDC

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: Rc, Control Unit: A (Air Filter w/Auto Drain, Regulator, Air Release Valve), Voltage of Air Release Valve: 5 (24VDC)

SYJA3000

SYJA7120-01-F JIS symbol Body ported Fluid Specifications 2 position double 2 position single (A) 4 (B) 2 (A) 4 (B) 2 Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 X P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 2 position single Operating pressure range (MPa) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position 3 position closed center 3 position exhaust center

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: 01 (Rc1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment

4/5 Port Air Operated Valve SYJA3000 Series

(For mounting) 35 (Bracket) 2 x 3.2 (For mounting) 10.8 68.8 VZA 1/8,1/4 (P , A, B port) Manual override (44) (36) VFA 21 28 25 14 VFRA 54 (3.6) 65.6 (26) (34) 40 1/8 (P , R1, R2 port) 1.8 (Bleed port) 25.5 VPA4 20 12 1.6 P R2 R1 18 22 22 11.5 SYJA 18 1/4 (R1, R2 port) 31.5 1.8 (Bleed port) 27.2 63 VZA 01 02 2 position double: SYJA7220-01 2 position double: SYJA7240VTA 2 x 4.3 (For mounting

4/5 Port Air Operated Valve Series SYJA3000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Water Regulator

-X224 WR110-02-X215 Inlet pressure: 0.6 MPa Inlet pressure: 0.8 MPa 0.4 0.3 0.4 0.5 0.6 0.7 0.8 Outlet pressure [MPa] Outlet pressure [MPa] 0.3 0.2 0.1 0.2 0.1 Flow rate [L/min] 0 0 Flow rate [L/min] 0 0 1 2 3 4 5 6 1 2 3 4 5 6 Dimensions Construction 40.5 e w u 40.5 y IN OUT r M30 x 1.5 Panel cut dimension 30.5 q t Component Parts No.

Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option

Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option

Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: 01 (R 1/8), Option 1: w/o Lead Wire, Option 2: None, Option 3: T (w/o Operation Manual, Calibration Certificate)

,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting