Ionizer

19.6 25 80 x (n-1) 70 10 25 Emitter cartridge n (Number of emitter cartridges), L Dimension L(mm) 300 380 620 780 1100 1260 1500 1900 2300 n Part no. 3 4 7 9 13 15 18 23 28 (Name plate position at 300 mm length) IZS31-300 IZS31-380 IZS31-620 IZS31-780 IZS31-1100 IZS31-1260 IZS31-1500 IZS31-1900 IZS31-2300 660 A Ionizer Series IZS31 Dimensions End bracket/IZS31-BE When mounted outside in (33

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. + 4 x (n pcs. 1) 360.3 360.3 360.3 4 x R3 or less 4 x R3 or less 33 ZSE20(F)/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

Air Cylinder

M9mWV D-M9mA/M9mAV Hs A Ht B [mm] Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV A B 32 7.5 7 40 6.5 7 45 6.5 7 50 7 6.5 56 7 6.5 63 8 8 67 8 8 80 9 9 85 9 9 100 9 10 Auto switch model Auto switch model D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV Hs Ht Hs Ht 32 24.5 22.5 30.5 22.5 40 28.5 25.5 34 25.5 45 30.5 27.5 36 27.5 50 33

Pulse Valve

Dimensions [mm] Model Port size P A (B) (C) (E) (F) (G) H J K L M JSXFAE-06 3/4 74 76 113 54 83 54 25.4 41.3 25.4 18.8 JSXFAE-10 1 94 90 137 82 120 65 33.3 44.4 38.1 31.6 JSXFAE-14 1 1/2 126 117 178 92 170 139 80 51.3 50.7 45 33 7 Pulse Valve Valve for Dust Collector JSXFA Series Dimensions: JSXFAF/Direct Piping Type Port size: Sizes 06, 10 A A A A Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot

INFORMATION Step Motor Controller 5 types of communication protocols New New

removing DIN rail) 187.3 (When locking DIN rail) 152.5 161 170 Mountable on DIN rail (35 mm) 77 17.5 4.5 For body mounting (Screw mounting) L 5.25 12.5 (Pitch) 7.5 5.5 (25) (35) 1.25 L Dimensions [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33

One-touch Fittings

10.4 9.7 16.5 28.4 33.6 28.9 13.3 10.4 6 3.2 16.5 10 13.9 11 4.5 19.5 3/8 KQ2LU06-03GS 17 10.4 9.7 16.5 29.8 35 29.9 13.3 10.4 6 4.2 16.5 10 13.9 11 4.5 31.5 N Q1 O 8 1/8 KQ2LU08-01GS 14 13.2 13 18.2 25.7 32.3 29.2 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 16.4 1/4 KQ2LU08-02GS 14 13.2 13 18.2 30.1 36.7 32 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 21.5 3/8 KQ2LU08-03GS 17 13.2 13 18.2 31.5 38.1 33

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT Min. port size Weight (g) A D1 D2 L M Model Applicable tubing Nylon Urethane KSH03-34S KSH03-32 9 14 17 23 23 29 55 63 8 10-32 UNF 36.5 37.6 38.6 42 43.1 46.5 53.5 53.9 33 34.5 35.5 36.5 40 41 48 48.5 16 2.5 5 32 10.4 4.0 4.0 12 1 8 12.7 KSH07-34S 14.29 17 1 8 1 4 13.4 10.4 4 13.2 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5

Dedicated Controller

Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command.

Industrial Filters

Applicable model FGGS FGGL O-ring 1 1 FGF-KT01 FGF-KT02 V-band 2 1 CY-27S O-ring 3 1 FGE-OP007 FGE-OP008 Hexagon plug 4 1 33 FGG Series Dimensions 214 0 3 x 15 For M12 foundation bolt AIR VENT OUT 30 197 DRAIN IN AIR VENT 90 270 G1/8 180 150 ORIENTATION C Dimension required for removal Rp1/4 A B Rc2 IN Rp3/4 DRAIN Rp1/4 190 440 360 Rc2 155 145 OUT (mm) C B A Model FGGSB FGGLB 1180 to 1415

Refrigerated Air Dryer

refrigeration Fan motor Compressor for refrigeration Pressure switch Pressure switch Condenser Fan motor Evaporation thermometer Capillary tube 93 C IDFAE Series Dimensions IDFA3E to 15E1 A B A D E Q C F G C M N L P K 4 x 13 In case of IDFA3E IDFA4E to 15E1 Dimensions (mm) B C D E F G K L M N P Q A Model Port size IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 15 Rc 3/8 226 410 473 67 125 304 33

Slider Type Ball Screw Drive/11-LEFS Series

Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS16 (72) ( ) +0.025 0 3H9 depth 3 40 Body mounting Note 1) reference plane 4 x M4 x 0.7 thread depth 6.4 24 28 3.5 39.4 ( ) +0.025 0 3H9 depth 3 L Cable length 250 (37) A (Table traveling distance) Note 2) (110) 37 40 (41) [39] 39 [(41)] Stroke (2.4) 7 65 [Origin] Note 4) Origin Note 3) 27 4 [2] 2 [4] 9.2 Motor cable (2 x 5) 46 6 20 33

Series 12-REA Sine rodless cylinder

Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 2-M5 x 0.8 4(A), 2(B) port Direct manual override Indicator light 0.5 0.5 4 (11) 11 2 5.5 0.6 0.6 15 5.3 5.3 13 34 33 25.5 29 6 3 L plug connector (L) 21.5 4 2-3.5 mounting hole 28.5 49 50.5 2-M5 x 0.8 1(P), 3(R) port 3 1 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

Support Guide/11-LEFG Series

1.08 1.23 1.4 1.56 1.72 1.88 2.04 2.20 2.36 2.52 2.88 2.84 3.00 3.16 3.22 11-LEFG40-S 2.07 2.29 2.51 2.72 2.94 3.15 3.37 3.58 3.80 4.01 4.23 4.44 4.66 4.87 5.09 5.30 5.52 5.73 527 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG16-S 4 x M4 x 0.7 thread depth 6.4 3H9 (+0.025 0 ) depth 3 24 40 (72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33

Motor Operated Auto Drain ADM200 Series

Description Material Voltage D126J45-29 (100 VAC) D126J45-31 (200 VAC) D126J45-33 (240 VAC) D126J45-30 (110 VAC) D126J45-32 (220 VAC) 812PG-DC24V (24 VDC) Part no. AMH Cap Body AME 3 Motor AMF ZFC Operating time 201324 (Nil) 201325 (4) 201326 (6) 201327 (8) 4 Cam Cast steel SF SFD 5 6 NBR KA01323 O-ring Brass, NBR 20137-1A Valve assembly LLB AD AD GD 379

Large Flow Air Filter AF800/900 Series

Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528

Compressed Air Preparation Filter

. ** New element *4 Water droplet elimination rate for the conditions below in addition to the rated conditions above [Test method ISO 12500-4:2009 compliant] ** Water droplet at filter inlet = 33 ml/m3 (ANR) (Water droplet indicates condensed moisture.

Quick Exhaust Valve Series AQ

AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4 1 8 AQ3000 AQ1510 45 33

With Factory Installed

S. l AR2001 2501 3001 : Max.3.5t :-t-tt ., AR4001 : Max.5.0t ~ I II; a -tp ort cenler (fJ ~ ~c=Pr r-IN j~ OUT f= 0 .bj=J ~ A * N P Q Bracket mounting dimensions Model Port size A B C 0 E F G H J K L M AR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 25 8 33 AR2501 1/4 3/8 53 102.5 25 48 32 30 34 44 5.4 15.4 55 2.3 33.5 25 843 42.5 32.5

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3