IDUS/IDFS , 240VAC (50Hz) Single phase, 220VAC (50Hz) 4 6 M A C L R Option With anti corrosive treatment With heavy duty auto-drain With circuit breaker With motor operated auto-drain With cool compressed air Model IDUS3E IDUS4E IDUS6E Note 1) All the options are not currently available.
direction R T IN-OUT reversal direction Element service indicator Element service indicator Note) 20is applicable only to products with N.C. auto-drain (C) or N.O. auto-drain (D).
(ML2B) (CE1-R) DO-ring Parts sorting: To classify the different types of parts.
Note Material Rod cover White anodized Aluminum alloy q RZQ Head cover White anodized Aluminum alloy w Cylinder tube Hard anodized Aluminum alloy e MI W S Piston rod Hard chromate plated Carbon steel r Piston Hard anodized Aluminum alloy t CEP1 Bumper Urethan y Plastic magnet u CE1 Bushing i Relief valve assembly L o CE2 Relief valve assembly R !0 Plate !
Connecting bracket A Connecting bracket B Pressure outlet port assembly Bushing projection Connecting bracket A r Mount the connecting bracket A, and tighten the hexagon socket head cap screw with the following torque.
Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.
0 o i u y t r e w q No. Description Type Contents Power supply indicator Illuminates when power is supplied. Flashes when the supply voltage is irregular. 1 LED (Dark green) Sensor indicator 2 Illuminates when the feedback sensor, autobalance sensor [high-precision type], or autobalance sensor [body-mounting type] is connected.
LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)
Motor mounting position: Parallel Symbol Direction Size R Right side 16/25/32/40 L Left side Motor option Grease application (Seal band part) Stroke Nil Without option B With lock Nil With N Without (Roller specification) 50 50 to to 1200 1200 For details, refer to the applicable stroke table below.
G Lead wire length Digital pressure sensor 0.6 m 5 m Nil X202 PPA A variety of installation options Screw includedM5, Mounting bracket M5 type only 8 1 R , 4 1 R Unit specifications AL With the unit switching function Note) Nil M Port size Fixed in SI unit (MPa) M5 (Female thread) R1/8 R1/4 M5 01 0 Note) With unit switching function is not permitted to sell for the domestic use in Japan,
q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
R/W undetected: NFC reader/writer driver is installed. NFC reader/ writer is not identified or USB is not connected. 5 R/W connection status R/W detected: NFC communication with the wireless unit is available. When the Advanced Card Systems Ltd. ACR1251U/ACR1252U is used. No driver: NFC reader/writer is not identified or USB is not connected.
R/W detected: NFC communication with the wireless unit is available. R/W undetected: NFC reader/writer is not identified or USB is not connected. Installation not performed: NFC reader/writer driver is not installed. R/W detection/ R/W no-detection button 5 Refer to Preparation befor use (2. Preparation befor use (page 7)).
Content One of two symbols, R or W. R: Read data from the product W: Write or store data to the product Identification The classification symbol (identification code) of read or written data with 3 digit alphabetical ASCII codes. Refer to page 3-9 3.9 Identification Code List. Numeric data Read or written data with 5 digits regardless of its type.
Content One of two symbols, R or W. R: Read data from the product W: Write or store data to the product Identification The classification symbol (identification code) of read or written data with 3 digit alphabetical ASCII codes. Refer to page 3-9 3.9 Identification Code List. Numeric data Read or written data with 5 digits regardless of its type.
XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.
R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.
A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV
Grease application (Seal band part) Motor option Nil With Nil Without option B With lock N Without (Roller specification) Driver type Cable type Size Compatible Power supply Nil Without cable drivers voltage [V] 25 32 40 S Standard cable Nil Without driver R Robotic cable A1 LECSA1-S 100 to 120 (Flexible cable) A2 LECSA2-S 200 to 230 Cable length[m] B2 LECSB2-T 200 to 240 Nil Without cable
D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !