MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

MRHQ

Port B 4-M6 x 1 depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 R SMC R E 16 8 O P P T A I R R G Y R A I 48 36 Side A Side B 12-11-15 16 Series MRHQ Dimensions MRHQ25 A 70 58 B 93 4-M6 x 1 depth 10 47 64 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 66h9 0

Compressed Air Preparation Filter

A A 1/4 G Maintenance space Drain J: Drain guide G Maintenance space Drain Thread type Rc, G: 10 One-touch fitting Thread type NPT: 3/8 One-touch fitting A 3/8 G Maintenance space Drain Figures indicate the auto drain (1.0 MPa).

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH. H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

PFxx-OMJ0005CN

() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B C() A B C() Rc1/81/4 Rc1/81/4

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

RSH

MK/MK2 RSQ/RSG RSH A CE1 Auto switch mounting position Auto switch model D-Z7l D-Z80 D-Y59 D-Y7P D-Y69l D-Y7PV D-Y7lW D-Y7BAL D-Y7lWV CE2 ML2B Bore size (mm) A B A B A B A B 20 18 8 18 9.5 18 2 18 4 ML1C 32 13.5 10 13.5 12 13.5 4.5 13.5 6.5 50 21.5 12 21.5 14 21.5 6.5 21.5 8.5 REA 63 16.5 31 16.5 33 16.5 25.5 16.5 27.5 80 26 33 26 35 26 27 26 29 REC RHC How to Install an Auto Switch MTS To

4/5 Port Air Operated Valve SYJA3000 Series

double: SYJA7240VTA 2 x 4.3 (For mounting) 34 8.5 63.6 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) VGA B A 1 1 13 3 VPA B A 34 27 B A 1 1 1/8 (A, B port) 2 x 3.2 (For manifold mounting) 17 R1 R2 P VPA3 35 31.5 63.6 35 2 x 3.2 (For mounting) Manual override 74.6 Manual override 1/8,1/4 (P , A, B port) 28 25 21 14 74.6 54 1/8 (P , R1, R2 port) 40 2 x 1.8 (Bleed port) 25.5 20 12 1.6

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

Hydraulic Cylinders

L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5 depth 5.4 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15

Coolant Valve

1 2 4 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 7 Valve size 1 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC

CXT

2 Steel wire NBR Spring seat metal Nickel plated Piston seal @8 !3 CY1 Carbon steel, Elastomer NBR Adjusting bolt (With damper) Nickel plated Tube gasket @9 !4 Carbon steel Nut Nickel plated !5 MY1 Replacement Parts: Seal Kits (A rod seal @7, a piston sael @8 and a tube gasket @9 are included in the seal kits. Order the seal kits with ordering numbers.) Kit No.

Digital Flow Switch Series PFA For Air Series PFW For Water

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.

Rotary Gripper Series MRHQ

4-M6 x 1 Depth 10 I N J E A D P A A M N R SMC R E O P 17 P T 21.5 27.5 A I R R G Y 7 R A I 8 17.5 32 8 42 Side A Side B Scale: 40% 12 Rotary Gripper Series MRHQ Construction Description Material Note Parts list No.

Digital Gap Checker

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Digital Flow Switches Series PF2A

OUT2 41.8 40.3 NC 8 Load 4 Sensor 40 4.3 OUT1 Black Main circuit Main circuit 7 3 Load Brown 6 2 Blue + SMC FLOW SWITCH 5 1 12 to 24 VDC Series PF2A5 35.8 A 40 UNIT PF2A30-A RESET SET OUT2 NC 8 Load 4 Sensor OUT1 Panel fitting dimensions Black 3 x 7.2 (=21.6) 7 3 Load 8-M3 36 +0.5 0 6.4 Brown 6 2 + Blue 5 1 12 to 24 VDC 1 2 3 4 Series PF2A5 PF2A31-A 36 +0.5 0 19.4 Do not connect the white

Cylinder with Lock Series CLS

When using a single/double knuckle joint together with a rod end nut, the A and H dimensions should be extended.

Air/Manually Operated High Purity Chemical Valve Series LV

A B A B Non-locking Locking Threaded Type LVH20 4 LVH30 8 LVH40 12 Model Orifice diameter Material SUS316 PPS PFA 1/4 3/8 3/8 3/8 SUS316 PPS PFA 3/8 1/2 1/2 1/2 SUS316 PPS PFA Port size 1/8 1/4 1/4 1/4 Symbol Type Basic type Valve type N.C. A B A B Non-locking Locking Manifold (5 stations max.)

NARM Series

1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

17

Do not use a shock absorber together with air cushion. Shock absorber Lock plate 1191 MY1B Series Construction 25, 32, 40 MY1B25 to 40 r @3 @9 y u t !5 w @7 !1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !