SMC Corporation of America
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L/min w e L t Unit display of flow rate for air/ Red (PF2A200, 201 for air only) CH1 to 4 will illuminate when the normal condition (nor) is selected. e OUT1 CH y Unit display/Orange Illuminates the selected unit.

(Port indication: P: supply port; V: vacuum port; E: exhaust port.) Matching the ejector to the vacuum circuit Refer to technical data on page 13-110 to 19 for precautions on the vacuum circuit.

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

1 towards the right, and the pressure at the right side of top diaphragm e decreases, causing top diaphragm e to move to the right. Then, valve y moves away from the left surface of top diaphragm e, the outlet pressure flows from port A via the valve hollow and is discharged through port (atmosphere).

The power supply for control and input, or the input device, is Off. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 DX E/DX F DY B/DY E/DY F Content Content Content DM E/DM F ST: STatus display LED ST: STatus display LED ST: STatus display LED

Wire core size AWG24-26 (0.14 to 0.2mm) AWG24-26 (0.14 to 0.2mm) AWG20-22 (0.3 to 0.5mm) AWG20-22 (0.3 to 0.5mm) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 1.4 to 2.0 PSE521 1.0 to 1.4 PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. Brown Black Blue N.C. 1 2 3 4 F.G.

L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Parts list No. Description Parts list No.

Auto switches are mountable/removable even when the plate is retracted.Guide rod type compact cylinder , Bore sizes *: 12, 16, 20, 25, 32, 40, 50, 63, 80, and 100, Standard strokes *: 5 to 100 , 4 times the lateral load resistance of the CQ2K , Non-rotating accuracy 0.2 or less COMPACT CYLINDER W/GUIDE. Compact Guide Rod Cylinder, CQM. 962 lb.

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT GUIDE, SLIDE BRG, ACTUATOR, MGP COMPACT GUIDE CYLINDER, NM, 50MM MGP SLIDE BEARING, 11.68449 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040050MGPM50??3.36??4.004.735.376.016.657.297.939.5410.812.113.4

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 455, 9.42000 lb

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT GUIDE, BALL BRG, ACTUATOR, MGP COMPACT GUIDE CYLINDER, HB, 20MM MGP BALL BEARING, 3.05529 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040020MGPL20?0.70?0.770.890.971.141.311.521.691.872.042.422.773.123.47

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT GUIDE, SLIDE BRG, ACTUATOR, MGP COMPACT GUIDE CYLINDER, HM, 20MM MGP SLIDE BEARING, 4.26226 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040020MGPM20?0.67?0.750.830.911.171.371.571.761.962.162.633.033.423.82

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, TIE ROD, CA2, ACTUATOR, CA1/CA2 TIE-ROD CYLINDER, PE, 63MM CA1 DBL-ACT AUTO-SW, 7.60594 lb

E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.