Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 10 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: R (External Pilot), P,E Port Size: N (ø1/2")
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: VA (CC-Link - 32 Outputs - Connector M12), SI Unit Ouput Polarity: Positive Common, NPN, Valve Stations: 2 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: R (External Pilot), P,E Port Size: ø12, Mounting: D (DIN Rail Mounting, w/DIN Rail), DIN Rail Option: 3 (for 3 Stations; Longer Rail than Total
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 7 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: R (External Pilot), P,E Port Size: ø12, Mounting: D (DIN Rail Mounting, w/DIN Rail)
Slit Valve 0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
The movement is linked via connecting rod r and feedback spring w to the input diaphragm e balancing the higher pressure. When this occurs nozzle y clearance increases allowing centralizing of the spool o to take place. This holds the piston rod in the new position. Input signal increase results in proportional movement of the piston rod.
AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E
Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.
Description Material Note Aluminum alloy Hard anodized Side plate q Carbon steel Black zinc chromated Finger w Carbon steel Black zinc chromated Lever e Carbon steel Black zinc chromated Joint r Stainless steel Shaft t Stainless steel Joint pin y Soft steel Black zinc chromated Cylinder plate u Stainless steel Lever pin i Steel lined oil imfilled acetal resin bearing Bearing o Compact cylinder
Bolt interferes with speed controller 712 MHW2 Series 180 Angular Type Air Gripper Rack & Pinion Type Construction Closed condition r e @1 @0 !2 !6 !4 o t !8 i !9 !0 !7 !3 !5 u y q e w @2 !1 Open condition MHZ MHF MHL MHR MHK MHS MHC Component Parts MHT No.
OUT 12.6 3.26 2.00 0.74 5.78 4.52 4 2 IN 1.47 1.1-4 Air Cylinder/Single Acting (Spring Return) Series CJ1 Construction CJ1B2-lSU4 CJ1B4-lSU4 CJ1 CJP Component Parts (Impossible to disassemble) CJ2 Description Material Brass Brass Stainless steel Stainless steel wire NBR Brass Steel Note Electroless nickel plated Electroless nickel plated No. q w e r t y u Rod cover Cylinder tube Piston rod
Description Material Note Aluminum alloy Hard anodized Side plate q Carbon steel Black zinc chromated Finger w Carbon steel Black zinc chromated Lever e Carbon steel Black zinc chromated Joint r Stainless steel Shaft t Stainless steel Joint pin y Soft steel Black zinc chromated Cylinder plate u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office
Description Note Body Valve guide Piston Bonnet Handle Adjusting spring Valve Material VEX PBT Brass Polyacetal Brass Brass Steel wire Brass q w e r t y u Replacement Parts Electroless nickel plated AW Mounting/Adjustment No.
2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !
Body/Exhaust Type: C (For Manifold - Common Silencer Exhaust), Nominal Nozzle Size: 15 (ø1.5), Supply Valve and Release Valve: E (N.O. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: R (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / PNP 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 08 [ø8 One-touch Fitting
Body/Exhaust Type: C (For Manifold - Common Silencer Exhaust), Nominal Nozzle Size: 10 (ø1.0), Supply Valve and Release Valve: E (N.O. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: R (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / PNP 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 06 [ø6 One-touch Fitting
Furthermore, VHK□R series flame-resistant type valves are still available. The VHK series catalog can be found here.
Model: 12 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins, IP40), Connector Entry Direction: 1 (Upward), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P,E Port Size: N (ø3/8" One-touch Fitting, Inch)
Model: 12 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins, IP40), Connector Entry Direction: 2 (Lateral), Valve Stations: 8 Stations, P, E Port Location: D (D Side), SUP/EXH Block: R (External Pilot), P,E Port Size: N (ø3/8" One-touch Fitting, Inch)
Model: 12 (Top Ported), Number of Cores: L3 (9 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 4 Stations, P, E Port Location: U (U Side), SUP/EXH Block: R (External Pilot), P, E Port Size: N (ø3/8" One-touch Fitting), Mounting: D7 (Longer than Standard DIN Rail)