Antistatic One-touch Fittings Series KA

(mm) Weight (g) M A L D Part No. 3.2 4 33.5 34.5 36.5 18.5 KAR23-04 18.5 17.5 18 15.5 9.6 3.4 2.9 2.3 2.1 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 10 KAR04-10 39.5 37 39.5 3.6 3 KAR06-08 8 18.5 6 10 KAR06-10 17 12.8 KAR06-12 42 5.2 12 20 3.5 13.1 13.1 8 KAR08-10 41 4.5 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 5.1 12 10 KAR10-12 42 33 32.8 32.8 12 20 21 17 139

IDX-OM-W023

M 10 M IDU8E/11E/15E1-10/20 10-1 ( ) IDU Series 10-1 10 1 IDX-OM-W023 10 M 10-2 ADM200 IDU8E15E1-10-M IDU8E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W (R1/2) (Rc3/8) Rc1/2 26 Rc1/2 IDU Series 10-2 10 2 IDX-OM-W023 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W023 11 R

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

100 P = 0.5 MPa Load weight m(kg) Load weight m(kg) D40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 -X 50 40 25, 50st 10 30 205 4 3 2 20 Data 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg

Ejector Valve Unit, Series ZYY/ZYX

20 -40 -40 -40 -40 Suction flow rate Suction flow rate 10 10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics

76

5 G H 0 E A F 4 (20) 14 (10) 32 (0) 50 (10) 68 (20) 86 (30) 104 (40) 122 (50) 140 (60) 32 (0) 50 (10) 68 (20) 86 (30) 104 (40) 122 (50) 140 (60) 158 (70) 176 (80) Ambient temperature (Air compressor intake air temperature) F (C) Pressure dew point F (C) How to calculate the amount of condensed water Example) To obtain the amount of condensed water when the pressure is applied to air up to

Electric Actuator / Guide rod Slider

offset=10 Changed to Origin offset-10 Origin 50mm 0 10 20 30 40 50 CCW CW Stroke[mm] Origin 50mm 10 20 30 40 50 60 CCW CW Stroke[mm] Origin 50mm -50 -40 -30 -20 -10 0 CCW CW Stroke[mm] Origin 50mm -40 -30 -20 -10 0 10 CCW CW Stroke[mm] Origin 50mm -60 -50 -40 -30 -20 -10 CCW CW Stroke[mm] -25- 4.

KN Series Nozzles for Blowing

34.6 35.6 36.3 37.1 29.5 27.7 40.4 41.3 31.2 40.1 38.4 45.6 43.9 10 10 12 12 12 14 14 17 17 17 17 17 19 19 19 24 24 27 27 10 10 12 12 12 14 14 14 14 14 14 14 17 17 17 22 22 26 26 4 4 6 6 6 8 8 10 10 10 10 10 12 12 12 16 16 20 20 1 1.5 1 1.5 2 1.5 2 2.5 3 3.5 4 6 3.5 4 6 4 6 4 6 D H2 H1 M L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection thread L1 A Width across flats H1

MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

HEC-OM-U015

HECR008-W HECR012-W 1 Unused BUS + 0 0 Operation temp. range 10.0 to 60.0 C (No dew condensation) 5 4 3 2 1 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 During operation or maintenance of the product, do not disable the Communication Indication temp. range -9.9 to 80.0 C 2 RXD (RD) Unused Circulating fluid temp. deg.C Circulating fluid temp. deg.C connector Temp: 10 to 35 C Humidity : 35

3 Port Solenoid Valve

Number SS070A 01 1A O-ring FKM 10 SS070A-80A-1 Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel 10 SS070A-80A-3 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > 2 U side end plate assembly No.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Replacement part/grease pack part no. : 20, 25, 32 : GR-S-010(10 g) 40, 50 : GR-S-020(20 g) 713 MHW2 Series Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth

c

160 180 200 220 240 260 Operating temperature (oC) Inch size 20 TILM01 N Max. operating pressure (MPa) 1.2 D 1.0 Tubing designation Length per roll Symbol 10 20 50 100 16 33 2S 0.8 Type Length 10 m 20 m 50 m 100 m 16 m (50 ft) 33 m (100 ft) 2 m 0.6 Color indication F Symbol N R BU B Color Translucent Red (Translucent) Blue (Translucent) Black (Opaque) 0.4 Roll G 0.2 Straight 0.0 20 0 20

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Ejector Valve Unit Series ZYY/ZYX

-40 -40 20 -40 Suction flow rate Suction flow rate -20 10 -20 -20 10 -20 0 0 5 10 15 20 25 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Y3 X3 ZY -10L Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

CEx-OMI0064

CE*OMI0064-C CEU5 1 . 1 2 . 4 2-1 . 4 2-2 . 4 3 . 5 4 . 7 5 . 9 6 . 10 6-1 . 10 6-2 . 10 6-3 . 11 6-4 . 11 6-5 RS-232C . 11 6-6 . 12 7 . 13 7-1 . 13 7-1-1 . 13 7-1-2 . 13 7-1-3 . 14 7-1-4 . 15 7-2 . 16 7-3 . 20 7-3-1 . 20 7-3-2 . 20 7-3-3 . 20 7-3-4 No. . 20 7-3-5 . 21 7-3-6 . 22 7-3-7 . 23 7-4 (E2ROM) . 25 8 RS-232C . 26 8-1 . 26 8-2 . 26 9 BCD .

Guide Table Series MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

Sensor Monitor

(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure