Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: L (Left Side), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A017 (Straight Machined ref NAAMS ACA117M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 135°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A018 (Straight Machined ref NAAMS ACA118M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A018 (Straight Machined ref NAAMS ACA118M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 60°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A018 (Straight Machined ref NAAMS ACA118M), L Arm Mtg Position: C (Mounting Position C), L Arm Style: A018 (Straight Machined ref NAAMS ACA118M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: A (Mounting Position A), L Arm Style: A006 (Straight Plain ref NAAMS ACA105M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A001 (Straight Plain ref NAAMS ACA100M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A001 (Straight Plain ref NAAMS ACA100M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: L (Left Side), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A029 (25mm Offset Machined ref NAAMS ACA131M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: L (Left Side), Switch Type: T (Turk PNP), R Arm Mtg Position: D (Mounting Position D), R Arm Style: A029 (25mm Offset Machined ref NAAMS ACA131M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: L (Left Side), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A011 (Straight Machined ref NAAMS ACA111M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A012 (Straight Machined ref NAAMS ACA112M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A050 (70mm Offset Machined ref NAAMS ACA154M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A050 (70mm Offset Machined ref NAAMS ACA154M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 45°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A014 (Straight Machined ref NAAMS ACA114M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A014 (Straight Machined ref NAAMS ACA114M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 120°, Arm Position: L (Left Side), Switch Type: T (Turk PNP), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A031 (25mm Offset Machined ref NAAMS ACA133M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)

PFM7.eng

Body [ on] With filter [oFF] Unused [oFF] Unused [AFL] Analogue output filter [Eco] Power saving mode [P in] Security code DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Lead wire to supply power and transmit output signals.

PFxx-OMO0004CN

) CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB 7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R

PFMC.eng

[H_1] Hysteresis of OUT1 25 50 100 [F 3] [ r ES] Response time [ 1.0] 1 second Mounting screws Caution Knurled part [P_2] Set value of OUT2 [F10] [ SUb] Sub display [ oUt] Set value 500 250 1000 Reset the accumulated flow. (Press the and buttons simultaneously for 1 second or longer).

Series: LEKFS, Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor Type: T6 (100W Output, Absolute Encoder), Lead: A (LEKFS25, 12mm; LEKFS32, 16mm; LEKFS40, 20mm), Stroke: 250mm, Motor Option: w/o Option, Grease Application: N (w/o, Roller Specification), Cable Type: R (Robotic Cable, Flexible Cable), Cable Length: 5 (5m), Driver Type: P2 (LECSN2-T-P, 200~240V, Absolute, PROFINET

Series: LEKFS, Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor Type: T6 (100W Output, Absolute Encoder), Lead: A (LEKFS25, 12mm; LEKFS32, 16mm; LEKFS40, 20mm), Stroke: 400mm, Motor Option: w/o Option, Grease Application: N (w/o, Roller Specification), Cable Type: R (Robotic Cable, Flexible Cable), Cable Length: 5 (5m), Driver Type: P2 (LECSN2-T-P, 200~240V, Absolute, PROFINET

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

CUJ

1 r y o e t !2 For 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male thread Parts list Replacement parts: Seal kits (double acting) Contents Note No. Description Material Kit no. Bore size 1 Hard anodized Aluminum alloy 4 CUJB4-PS Cylinder tube 2 Above numbers 11, 12, 13 and an exclusive grease pack.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with