WR110--X224/WR110--X215 Body material: Brass Body material: Special brass Best Pneumatics 14-E627 Port size Set pressure range (-X224): 0.08 to 0.39 MPa Rc1/8, Rc1/4 Set pressure range (-X215): 0.05 to 0.69 MPa Rc1/8, Rc1/4 NPT1/8, NPT1/4 Port size: Rc1/8 Port size: Rc1/4, 3/8, 1/2 Series WF300 14-E628 Series WF300 Dimensions 25 25 A A 14 41 54 29 66.5 Construction A-A Component Parts q
Flow Rate Characteristics Conditions/Fluid: Water, Port size: Rc1/4 WR110-02-X224 WR110-02-X215 Inlet pressure: 0.6 MPa Inlet pressure: 0.8 MPa 0.4 0.3 0.4 0.5 0.6 0.7 0.8 Outlet pressure [MPa] Outlet pressure [MPa] 0.3 0.2 0.1 0.2 0.1 Flow rate [L/min] 0 0 Flow rate [L/min] 0 0 1 2 3 4 5 6 1 2 3 4 5 6 Dimensions Construction 40.5 e w u 40.5 y IN OUT r M30 x 1.5 Panel cut dimension 30.5 q
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
0 Initial air supply valve pilot port S @0 Bonnet assembly q Main air supply valve pilot port M !9 Diaphragm (Material: Stainless steel 304) u Valve seat (Material: FKM) y External seal (Material: FKM) e Bellows (Material: Stainless steel 316L) !
Emergency display Display: Red/display the error code on Lt;;D Pressure display 3 1/2 Digit LCD Se ~ diagnosIs functIOn Excess pressure/Data error/ NoIe2) Excess current/Pressure during O-clear Operating temp.range O~50 'C I Bottom mode Noise resistance 500Vp~p pulse width 1 itS standing 1 nS fbl/nn lULl Insulation resistance Between whole wires and case 2M Q (SOVDC by megameter) Vibration
If the piping diameter is reduced, it may lead to insufficient flow of supply air, reduction of suction flow and reduction in the vacuum pressure. 1 The values indicating characteristics are representative values, and may vary depending on the atmospheric pressure (weather, altitude, etc.). 2 Supply pressure: 0.45 MPa Construction Model Selection Caution q t w r e y 1.
JIS Symbol Construction/Dimensions AD402 AD600 Rc 1/4, 3/8, 1/2 Valve assembly Body Rc 3/4, 1 O-ring Body Gauze Lever Valve HA O-ring Chamber Piston assembly AT Float Spring Case ID Long hole of chamber Piston O-ring AMG Rc 3/4, 1 Drain guide Component Parts AFF Drain Rc 3/8 No. q Description Body Material Aluminum die-casted AM Working principle (AD402) When no pressure is applied internally
No. w q Description ADC12 ADC12 e Note) Description Cap Body Motor Cam SCS13 r t C3604B 20137-1A Valve assembly y NBR S-16 O-ring 14-20-50 Note) Motor port no. in the case of 100 VAC: 812PG-100VAC
Stations: 3 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)
Manifold Type: 20 (Body Ported), Valve Stations: 8 Stations, A, B Port: 00T (NPTF), CE Marked: Q (CE Marked)
Stations: 10 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: 03 (Rc3/8), Mounting Base: S (U Side), Kit Type: Q (DeviceNetâ„¢, 16 Output Points), Option 1: None, Option 2: W (Dust Poof IP65 Rated)
Actuation: 3 (3 Position Closed Center), Seal: 0 (Metal Seal), Function: B (High-speed Response, 0.95W DC), Coil Voltage: 5 (24VDC), Light/Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), CE Compliant: Q (CE Compliant)
Actuation: 1 (2 Position Single), Seal: 1 (Rubber Seal), Function: N+R, Coil Voltage: 5 (24VDC), Light/Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), CE Compliant: Q (CE Compliant)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Magnet: D (Built-in Magnet), VAC Side Tube/Rod End Shape: Q (Rod Piping/Male Thread), Bore Size: 25mm, Port Thread: M5x0.8 (Bore 10, 16, 20, 25), Rc1/8 (Bore 32), Stroke: 50mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Size: 1/4, Thread: G, Port Size: 1/4-AV2000 Only, Option: None, Voltage: 24VDC, Lead Wire: Type Y DIN Terminal Without Connector, Surge Suppressor: None, Manual Override: Locking (Lever Type), Flow Direction: -, Q: -
Size: 3/8, Thread: NPT, Port Size: 3/8-AV3000 only, Option: None, Voltage: 24VDC, Lead Wire: Type Y DIN Terminal Without Connector, Surge Suppressor: -, Manual Override: -, Flow Direction: -, Q: -
Size: 1/2, Thread: NPT, Port Size: 1/2-AV4000 Only, Option: None, Voltage: 110~120VAC, Lead Wire: Type Y DIN Terminal Without Connector, Surge Suppressor: -, Manual Override: -, Flow Direction: -, Q: -
Size: 3/4, 1, Thread: G, Port Size: 1-AV5000 Only, Option: None, Voltage: 24VDC, Lead Wire: Type Y DIN Terminal Without Connector, Surge Suppressor: None, Manual Override: Locking (Slotted), Flow Direction: Right to Left, Q: -
Size: 3/4, 1, Thread: NPT, Port Size: 1-AV5000 Only, Option: Pressure Gauge, Voltage: 110~120VAC, Lead Wire: DIN Terminal, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Flush), Flow Direction: Right to Left, Q: -