！ Contact our sales office regarding a delivery date or a price since this is a special model. SP158X-002E P.G.Information (Specialized Product) P: TS SMC Corporation Liquid Dispense Pump (Solenoid type) 4-14-1, SOTO-KANDA

10 to 50(No freezing) Mounting orientation Unrestricted Note5) Enclosure Equivalent to IP40 Weight 90g(Body ported)85g(Base mounted) Rated voltage 12VDC, 24VDC Allowable voltage fluctuation 10% of the rated voltage Note6) Type of coil insulation Class B Lead wire AWG20(Outside diameter of insulator: 1.79mm) Power consumption Operation noise 60dB(A) or less Note7) 4W 9W 17W Note1) The values

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

10-cy1s-e

Note 2) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 40: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 113

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: BN7 (ø1/4" One-touch Fitting), Downward Elbow

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A,B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate w/Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: BA (Direct Mounting, Name Plate w/o Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C4 (ø4 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)