5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
5 to 120/5 to 50Slide screw + Wedge cam?0.02?0.050.5 or less150/30605 to 4090 or less (No condensation)1265? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?