Air Slide Table 10 20 30 40 50 60 0 0 0 10 20 30 40 50 60 70 80 90 L3: Overhang Allowable range: 60 mm L3: Overhang Allowable range: 90 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ20(A)-75Z MXQ20(A)-100, 125, 150Z 7 7 V = mm/s V = mm/s V = 100 V = 100 6 6 Load mass m [kg] Load mass m [kg] 5 5 4 4 3 3 V = 200 V = 200 2 2 V = 300 1 1 V = 300 0 0 20 40 60 80 100 120 0 0 50 100 150 200 250 300
0.3 S + Stroke mC Z + Stroke RR mB ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A a CX mB mC d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 12 10 21 18 25 14 9.5
0 0 0 5 10 20 15 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] Vertical 1500 1500 1500 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] Z L8 500 500 500 Mep m 0 0 0 0 4 6 2 8 10 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 Work load [kg] Calculation of Guide Load Factor Mounting Orientation 1.
) CA CB BB 0 0.3 BA 0 0.3 KA CX+0.2 +0.1 ZZ + Stroke Z + Stroke S + Stroke H A NA U R BA 0 0.3 BB 0 0.3 Rod section : A clevis pin and retaining rings are included.
power source: UT1 with clock pulse 1 0 Input 0 & 4 power source: UT2 with clock pulse 1 1 Input 0 & 4 power source: each power source without clock pulse Bit 6 Bit 5 Bit 4 Discrepancy time for Ch.0 and Ch.4 (input connector 0) 0 0 0 Reserved 0 0 1 No limit (Disable) 0 1 0 10 msec 0 1 1 50 msec 1 0 0 100 msec 1 0 1 1 sec 1 1 0 5 sec 1 1 1 Reserved Bit 7 Input filter time for Ch.0 and Ch.4
Bit offset Item Notes 0 Accumulated flow SW1 0: OFF 1: ON 1 Accumulated flow SW2 0: OFF 1: ON 2 Flow rate SW1 0: OFF 1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis
Passivation/xxx)Byte 0Zone1-3Zone M Bit 0 IO (Zone M) 0: OFF, 1: ON 1 1 (Zone 1) 0: OFF, 1: ON 2 2 (Zone 2) 0: OFF, 1: ON 3 3 (Zone 3) 0: OFF, 1: ON 47 0 Table 10-8 Safety Mode (Module Passivation/xxx)Byte1 Zone M Output feedback parameter Bit 2 Bit 1 Bit 0 OFF 0 0 0 0 0 1 0 1 0 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 ON 0 0 0 0 0
-0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A a B C CDH9 CX D d E F G GA GB J K L MA MM NA NB P R RR S +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 10 23 60 44 12 21 17 18 45
() 1 () 1.5 (0) 2.5 (0.5) 5 (3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJP 20 6.5 (4) 5.5 (3) 0 () 1 () 1.5 (0) 2.5 (0.5) 5 (3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJ2 25 7.5 (5) 6.5 (4) 1 (0) 2 (0) 2.5 (0.5) 3.5 (1.5) 6 (4) 7 (5) 10.5 (8) 0.5 (0) 11.5 (9) 1.5 (0) 4 (2) 5 (3) 7 (5) 8 (6) CM2 32 40 11.5 6 7 13.5 7.5 8.5 11 12 15.5 5.5 17.5 6.5 9 10
0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7
0 0.4 0 0.4 0 0.4 0 0.4 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible MHQG2 compatible MHQ2 compatible 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 5 5 8 8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7
Bank Point Home position sensor position 0. 1. 0 0 0 0 0 0 Moves to the motor side at home position return speed Decelerates and stops at the home position sensor ON position Moves to the end side at low speed Moves and stops at 16 pulse position from the home position sensor OFF position Coordinate attribute Coordinates Speed pattern Operating procedures 1.
: Reserve 0 3: 0..10V 4: 0..5V 5: 1..5V 6: 0..20mA 7: 4..20mA 0x0382 CH0-CH1 Analog output range 1 Bit7-4: CH1 Bit3-0: CH0 Bit8-15: Reserve 0 0x0384 CH0-CH1 User setting value upper limit error 1 Bit7-4: CH1 Bit3-0: CH0 0: disable, 1: enable Bit8-15: Reserve 0 0x0385 CH0-CH1 User setting value lower limit error 1 Bit7-4: CH1 Bit3-0: CH0 0: disable, 1: enable Bit8-15: Reserve 0 CH0-CH1 Output
0.01 0.02 0.03 0.04 0 0.01 0.02 0.03 0 0.01 0.02 0.03 Time (s) Time (s) Time (s) LXFH5BD LXPB2BD/LXSH2BD LXPB5BD/LXSH5BD 80 80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load Transfer load 10kg 10kg Transfer load 50 50 50 3kg 6kg 6kg 2kg 3kg 3kg 1kg 0kg 0kg 0kg 0.01 0.02 0.03 0.04 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0 Time (s) Time (s) Time (s) Acceleration Time Guide/Ball Screw
0 to 10 V 0 to 5 V 0 to 20 mA 0FFF 4095 5.25 21 0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB -20No.EX-OMN0038-C Input signal range: -10
(mm) Series CQ2 CQS Bore size (mm) G G Th9 Th9 0 0.043 0 0.043 12 1.5 1.5 15 15 0 0.052 0 0.052 16 1.5 1.5 20 20 MGC Series MGG Series (mm) (mm) 0 0.043 0 0.043 20 2 2 13 13 0 0.043 0 0.052 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 0 0.043 25 2 2 15 15 Bore size (mm) Bore size (mm) Throttle dia. () Throttle dia. () 32 2 21 20 5 20 3 40 2 28 25 5 25 3.5 50 2 35 32 6 32 6 63 2 35 -X -
0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) a CX B C d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM A +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 12 10 21 18 25 14 9.5 M8 x 1.25 M14
Input unit for PNP (1 connector, 1 input type) Branch connector on the input unit side (e-con) CN0, 2, 4, ..., 14 Fuse For input +24 V q w e r q w e r For sensor +24 V +24 +24 +24 +24 +24 +24 +24 +24 RD (+) IN1 IN3 IN5 IN7 IN9 IN11 IN13 IN15 Input w RD () 0 0 0 0 0 0 0 0 For sensor 0 V For input 0 V IN0 IN2 IN4 IN6 IN8 IN10 IN12 IN14 Input q CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 V CN1, 3,
ITVX 20 Output pressure (kPa) 0.5 0.5 Return PVQ 40 0 0 Out VEF VEP 60 0.5 0.5 VER VEA 80 1 0 25 50 75 100 1.0 0 25 50 75 100 0 2 4 6 8 10 VY1 Input signal (% F.S.) Count Input signal (% F.S.)