AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

8 10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) With One-touch fittings Example) AS2002FS-04-X214 With indicator 10Clean Series 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing.

Precision Cylinder Series MTS

MTS 8, 12, 16, 20, 25, 32, 40 Precision Cylinder How to Order Port direction Bore size Nil P Standard piping type Axial piping type 8 8mm MTS 8 A90L 20 8 MTS 20 A90L 100 12 to 40 Bore size Number of auto switches Nil S 2 pcs. 1 pc. 12 16 20 25 32 40 12mm 16mm 20mm 25mm 32mm 40mm Auto switch type Without auto switch Nil Refer to the table below for auto switch part numbers.

VFA3000

1 8 1 4 1 8 1 4 1 8 1 4 VFA32302 position double 0.17 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3330-X1 3 position closed center 0.32 1 8 11.7 (0.65) 14.4 (0.8) 01 02 Base mounted (EXH: ) 1 8 VFA3430-X1 3 position exhaust center 0.32 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3530-X1 3 position pressure center 0.32 1 8 14.4 (0.8) 9.9 (0.55) 16.2 (0.9) 10.8 (0.6) 01 02 (EXH: ) 1 8 1 4 3

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at extension end) (Insert) Stroke adjuster at extension end KA 25 12 25 6.5 K NA x M6 x 1 thread depth 6.5 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 15 14 14 8 7.5 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 15 Operating port 2 x Rc, G, NPT1/8 13 3 5H9 ( ) depth 5 +0.030 0 2 x M6 x 1 thread depth 6.5 5H9 ( ) depth 5 +0.030 0 HA GA NN x M6 x 1 thread depth 12 6

Fieldbus system Ethernet POWERLINK compatible SI unit

Occupied word size Unit Unit part number Input Output System diagnostic 1 0 Diagnostic data Unit diagnostic 1 0 SI unit EX600-SPL1-X26 (32 outputs) 0 2 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs) (with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 1 0 EX600-DXE (16 inputs) 1 0 EX600-DXF (16 inputs) 1 0 EX600-DYB (8 outputs) 0 1 EX600-DYE

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

VDW

1/4 M5,1/8 27 20 AC type 3 (N.O.) port 20.5 VDW 25 34 4-5 3 (N.O.) port VQ 3 28 VX2 3 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 71 VX3 86 (82.5) 1 VXA 8 15 5 VN M5,1/8 1 (IN) port M5,1/8 2 (N.C.) port 8.5 (6.3) LVC 6 12.8 LVA 1/8, 1/4 1/8, 1/4 2-M3 x 0.5

10-cy1h-e

Grease pack part no.: GR-S-010 (10 g) Piston seal NBR Scraper NBR O-ring NBR O-ring NBR 116

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Port size M5 RC1/8 Weight kg 0.45 1.1 Note1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.

SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ON-flow 0.01 /2B, 6 11/2B, 21 0 0 0.2 0.4 0.6 0.8 1.0 Pressure (MPa) 1 2 3 4 5 Flow speed (m/s) Precautions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Be sure to read before handling.

Slide Tables MX Series

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 2.1{21.4} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 8 8 10 12 12 16 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 2. Side through hole mounting These conditions could lead to malfunctions.

EXxx-OMN0029CN

) 0 1 EX600-DXB (8 ) 1 0 EX600-DXC (8 ) 1 0 EX600-DXC1 (8 ) 1 0 () EX600-DXD (16 ) 2 0 EX600-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYE1 (24 ) 0 3 EX600-DYF (16 ) 0 2 EX600-DME (8/8 ) 1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB 4 4 (2/2 ) (2 byte/1 ) (2 byte/1 ) -59No.EX-OMN0029CN-D SI

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24