• Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .
0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !
L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.
1wo e t i y u !4 !5 !2 q o !7 r !3 o r !0 w u t y !2 !3 !1 q i !4 e Meter-in type Meter-in type AS ASP ASN AQ ASV AK ASS ASR ASF Component Parts: Elbow Type Component Parts: Universal Type No. Description Material Note Body A Handle Body B Needle Gasket Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring No.
A B Effective orifice(mm2 Weight (g) ) E H M-5H-4 M-5H-6 15.5 16.5 8.5 9.5 7 8 1.8 2.5 7 8 2.1 4.0 2.7 3.9 6.5 8.5 91 Series M Miniature Fittings M3, R(PT) 1/8, M5 Series M5 Hose elbow: M-5HL-4, -6 Part No. Effective orifice(mm2 Weight (g) ) F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.4 2.4 4.4 5.2 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 Hose elbow: M-5HLH-4, -6 Part No.
ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U
C( E) ( ) 1-1 3-2 ( ) 1-1 P. I. D3-3 5 P. I.
E) Remove the used element and O-ring from the bowl. In this operation, remove the support ring to make the replacement easier. D) E) Point O-ring for bowl Support ring Rotate approxim ately 10. Replacement should be performed while the bowl is held upright as the O-ring easily falls off. -18- Doc. no. AMX-OMU0058-C F) Remove the internal assembly which is mounted in the bowl.
For this reason, use caution that the valves with external pilot specification cannot be pressurized from exhaust port [3/5(E)]. As compared with the types which do not integrate the back pressure check valve, C value of the flow rate characteristics goes down. Please contact SMC for details.
C 4(A)2(B) 4(A)2(B) , [D ] SY 90 [E ] 60 MAX.
Integrated solenoid valve and speed adjustment mechanism; Compatible with UR3(e), UR5(e), UR10(e), and UR16(e); URCap downloadable; Standard ISO9409-1-50-4-M6
(e), UR16(e); URCap software downloadable; Standard ISO9409-1-50-M6
Bore size: 16mm; Compatible with UR3(e), UR5(e), UR10(e) and UR16(e); Weight: 430g (15.2oz); Gripping force: External: 32.7 N, Internal: 43.5 N; Action: Double Acting; Opening/Closing Stroke: 10mm; Standards: ISO9409-1-50-4-M6
(e), UR16(e); Standard ISO9409-4-50-M6
Integrated solenoid valve and speed adjustment mechanism; Compatible with UR3(e), UR5(e), UR10(e), and UR16(e); URCap downloadable; Standard ISO9409-1-50-4-M6
(e), UR16(e); URCap software downloadable; Standard ISO9409-1-50-M6
Bore size: 16mm; Compatible with UR3(e), UR5(e), UR10(e) and UR16(e); Weight: 430g (15.2oz); Gripping force: External: 32.7 N, Internal: 43.5 N; Action: Double Acting; Opening/Closing Stroke: 10mm; Standards: ISO9409-1-50-4-M6
(e), UR16(e); URCap software downloadable; Standard ISO9409-1-50-M6
Integrated solenoid valve and speed adjustment mechanism; Compatible with UR3(e), UR5(e), UR10(e), and UR16(e); URCap downloadable; Standard ISO9409-1-50-4-M6