0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%
Available in 32 and 40mm bores with strokes from 5 to 100mm; rotation from 90 to 180. Connection ports are available on both sides of the cylinder, as well as end-of-stroke sensing for all positions., 40MM MRQ DOUBLE-ACTING, ACTUATOR, MRQ MISCELLANEOUS/SPECIALIZED, MD, 40MM MRQ DOUBLE-ACTING, 8.1571 lb
Rotary table w/external shock absorber, Four bore sizes available, High precision or basic type available, 90 and 180 rotation available, Auto switch capable, 100MM MSQ DBL-ACT AUTO-SW, ACTUATOR, MSQ ROTARY ACTUATOR W/TABLE, SE, 100MM MSQ DBL-ACT AUTO-SW, 9.73169 lb
Rotary table w/external shock absorber, Four bore sizes available, High precision or basic type available, 90 and 180 rotation available, Auto switch capable, 10MM MSQ DBL-ACT AUTO-SW, ACTUATOR, MSQ ROTARY ACTUATOR W/TABLE, EE, 10MM MSQ DBL-ACT AUTO-SW, 1.355 lb
Rotary table w/external shock absorber, Four bore sizes available, High precision or basic type available, 90 and 180 rotation available, Auto switch capable, 30MM MSQ DBL-ACT AUTO-SW, ACTUATOR, MSQ ROTARY ACTUATOR W/TABLE, KE, 30MM MSQ DBL-ACT AUTO-SW, 3.57157 lb
Rotary table w/external shock absorber, Four bore sizes available, High precision or basic type available, 90 and 180 rotation available, Auto switch capable, 30MM MSQ DBL-ACT AUTO-SW, ACTUATOR, MSQ ROTARY ACTUATOR W/TABLE, KE, 30MM MSQ DBL-ACT AUTO-SW, 3.57962 lb
The table unit has positioning mechanisms for each 90 and 180 of rotation. Rotation position is detected by provision of an auto switch sensor.
A B C D E F G H I Model How to Order VHS20 VHS30 VHS40 VHS40-06 VHS50 59 78 107 110 134 20 29 39 42 53 40 53 70 75 90 34 46 63 67 78 22 21 26 45 55 58 65 76 33 42 44 50 61 28 30 36 44 54 45 55 63 69 81 30 03 RZ F VHS 3-port valve for residual pressure release Caution 1. Consult P/A when a pressure switch and T type spacer are installed on the outlet of pressure release valve 2.
AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90
pressure Ambient and fluid temperature Operating piston speed Stroke length tolerance Cushion Double acting, single rod Non-lube Air 1.05 MPa 0.7 MPa Without auto switch 10 to 70C (with no freezing) With auto switch 10 to 60C (with no freezing) 5 to 500 mm/s st + 1.4 0 Up to 300 mm Rubber bumper Basic, Axial foot, Front flange, Rear flange, Front trunnion, Rear trunnion, Clevis (in case of 90
Note 7) The sensor unit conforms to the CE mark. 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 20 40 60 80 100 0 90 45 Fluid temperature [C] Digital Flow Switch Series PF2D For Deionized Water and Chemicals How to Order Remote Type Display Unit PF2D3 A 0 M 0 Unit specification Nil M With unit switching function Fixed SI unit Output specification 0 1 NPN open collector 2 outputs
0.030 0.05 0.07 0.025 0.06 0.04 Pressure loss (MPa) Pressure loss (MPa) Pressure loss (MPa) 0.05 0.020 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 0 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 10 12 14 16 2 0 4 6 8 40 35 30 25 20 15 10 5 0 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PF2W711, 511 0.035 0.030 0.025 Pressure loss (MPa) 0.020 0.015 0.010 0.005 0 10 20 30 40 50 60 70 80 90
Station n L1 L2 L3 Station 2 58 49 43 3 74 65 59 Station 20 346 337 331 4 90 81 75 5 106 97 91 6 122 113 107 7 138 129 123 8 154 145 139 9 170 161 155 10 186 177 171 11 202 193 187 12 218 209 203 13 234 225 219 14 250 241 235 15 266 257 251 16 282 273 267 17 298 289 283 18 314 305 299 19 330 321 315 Port size One-touch fitting 30 Series SYJ500 Type 41R Manifold: Side Ported (External Pilot
speed 5 to 1000mm/s (2 to 39in/s) Without auto switch: -10 to 70C (14 to 158F) With auto switch: -10 to 60C (14 to 140F) Ambient and fluid temperature Cushion Rubber bumper, Air cushion to 800st: +1.4 0 Stroke length tolerance (mm) Thread tolerance JIS class 2 Basic type, Axial foot type, Front flange type, Rear flange type, Front trunnion type, Rear trunnion type, Clevis type (used for 90
Series CP95 Dimensions mounting accessories C, D, E and CR [mm] Mounting type C Mounting type D Bore E1 EW TG1FL l1 L I2 d1 CD MR d2 R1 E2 UB CB 32 45 26 32.5 22 5 12 5.5 30 10 9.5 6.6 6.5 48 45 26 40 51 28 38 25 5 15 5.5 35 12 12 6.6 6.5 56 52 28 50 64 32 46.5 27 5 15 6.5 40 12 12 9 8.5 64 60 32 63 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90