5 Port Solenoid Valve SY Series

) G H 1 2 23 32.3 (A, B port) 1/8 0.8 1.6 16.2 (20) 15 EA P EB 28.1 [32] For manifold gasket positioning 22.2 die-cast hole (P, EA, EB port) 1/8 27.2 32.5 20.5 23 32.3 L plug connector: L SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

ZISE30A.eng

Pressure Setting Item Default setting [F 3] Setting of response time 2.5 ms Measurement mode The power is supplied [F 4] Setting of display resolution 1000-split Safety Instructions [F 5] Setting of auto-preset Manual The measurement mode is the condition where the pressure is detected and indicated, and the switch function is operating.

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.