min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

0.5 (Proportional valve PID control)0.21/0.32 (at 23 l/28 l/min)23/28Approx. 20Rc1/2Stainless steel, PPE, PVC, Copper brazing (Heat exchanger), Bronze, Brass????Stainless steel, PVC, Copper brazing (heat exchanger), Bronze, BrassSingle-phase 200 to 230 VAC 50/60 Hz Allowable voltage fluctuation ?

0.5 (Proportional valve PID control)0.21/0.32 (at 23 l/28 l/min)23/28Approx. 20Rc1/2Stainless steel, PPE, PVC, Copper brazing (Heat exchanger), Bronze, Brass????Stainless steel, PVC, Copper brazing (heat exchanger), Bronze, BrassSingle-phase 200 to 230 VAC 50/60 Hz Allowable voltage fluctuation ?

(kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable ground fault circuit interrupter

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

(kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable ground fault circuit interrupter

(kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable ground fault circuit interrupter

(kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable ground fault circuit interrupter

(kW)Temperature stability Note 5) (C)Pump capacity Note 6) (50/60 Hz) (MPa)Rated flow Note 7) (50/60 Hz) (l /min)Tank capacity ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable ground fault circuit interrupter