Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: B (FKM Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: F (G(PF)), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: Q (CE Compliance)

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: B (FKM Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: N (NPT), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: Q (CE Compliance)

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: B (FKM Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: F (G(PF)), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: Q (CE Compliance)

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: B (FKM Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: N (NPT), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: Q (CE Compliance)

Stations: 04 Stations, Port Size: C6 (w/ø6 One-touch Fitting), SI Unit: Q (Device Net), End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: N (-COM), I/O Unit Stations: None, Option 1: None, DIN Rail Length: None, Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 5 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: C8 (ø8 One-touch Fitting), Mounting Base: S (U Side), Kit Type: Q (DeviceNetâ„¢, 16 Output Points), Option 1: None, Option 2: W (Dust Poof IP65 Rated)

Suction cups with flange

4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

4.5 Note) 30 4 x M4 x 0.7 thread depth 5 (Opposite side: Same) (Opposite side: Same) 4 x M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 5 10 10 8 46 2 x M4 x 0.7 thread depth 6 (30) (Z) 2 x M5 x 0.8 thread depth 8 5 450.2 8 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

Series CQ2

Bumper 8 Lead-bronze casting Bushing Seal kit No.

CC-Link-E

The m axi m um val ue O FFFh of dat a i s t he pressure set f or 100% F. S. 8 Syst em conf i gurat i on / Appl i cat i ons / Speci f i cat i ons Thi s product i s connect ed t o t he f i el d bus ( CCLi nk) as a sl ave.

Auto Switch Guide

Indicator light Indicator light -X 8 3.2 DC (+) Brown 2.6 2 4.6 4 202.7 4 2.8 Most sensitive position 6 2.8 22 500 (3000) 20 2.7 Data OUT Black 3.2 2.6 DC () Blue 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV Precautions OUT (+) Brown Be sure to read before handling.

Tamper Proof and Flat Head Screw

Port size Type Cylinder side M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 Symbol M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Solenoid valve side M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 PF1/8 PF1/4 PF3/8 PF1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 Elbow 2 Control type 0 1 Meter-out Meter-in SMC Pneumatics, Inc. 14 Series ASIII1F-T Dimensions

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

MGP

MGPMGP-A MGPS1.5MPa 1.0MPa 12,16 0.12MPa 16 0.15MPa 20100 0.1MPa 0.1MPa 0.2MPa 20100 -1060 ( 1263 50500mm/s 1663 50500mm/s 50400mm/s 80,100 50400mm/s 50400mm/s 80,100 +1.5 0 1 4. 4-1. (mm) 12,16 20,25 32100 mm) 10,20,30,40,50,75,100,125,150,175,200,250 20,30,40,50,75,100,125,150,175,200,250,300,350,400 25,50,75,100,125,150,175,200,250,300,350,400 MGP M L A 4-2.

NCA1

NY-325 NY-800 NY-1000 CB 1.265 1.515 3.032 CD 0.75 1 1 3/8 CE 2 3/8 3 1/8 4 1/8 CH 1 3/8 1 1/2 2 CW 5/8 3/4 1 F 1 1/4 1 1/2 2 L 1 1/4 1 1/2 2 1/8 A 1 1/8 1 5/8 2 KK 3/4-16 1-14 1 1/4-12 ER 3/4 1 1 3/8 Weight (lbs) 1.50 3.78 9.32 Note: Jam nut, pivot, and cotter pins are included. 12 Alignment Coupler F Shank dia.

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

ZSE30/ISE30

Piping Specifications Part N7L C6L C4L N7H C6H C4H T1 01 NPT 1/8 M5 x 0.8 R 1/8 M5 x 0.8 Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

PA3000/5000/PAX1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10