Modular Type Filter Regulator Series AW

Note 4) 90 450 Standard Option 8 25 Relieving type 0.59 45 0.44 1.25 Accessory part no. Applicable model Accessory Bracket assembly Note 1) AWD20 AWD30 AWD40 Note 1) Assembly includes a bracket and set nuts. Note 2) in part numbers for a round pressure gauge indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT.

End Lock Cylinder Series CBJ2

Auto switch model Number of switches D-A7 D-A80 D-A73C D-A80C 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 90

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Applicable tubing O.D. mm 2-Applicable tubing M P D 45.4 49.4 49.6 52.4 56.7 61.3 64.5 67.5 69.7 72.7 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 7 8 9 10 15 17 23 25 29 30 KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 4 7.5 10.4 7.5 18 10.4 14 L A M 6 18 12.8 18 19.5 12.8 26 45 45 70 70 100 26 35 45 55 70 90

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

Parls No. ol auto switch allof D-C7, C8, @swrc I SEBIES NCJ2 Standard Type: Double Acting/Single Bod +1.0 mm o + .04 in 0 Auto switch specification Symbol Double aqting/Single rod Relay Sequence controller lC Circuit \ : In-line Ansle 90' Weioht Table and ACCeSSOfies/prse rcre,10 p14 ro, drairs. caldllalion (Erampre) NcJ2L10-050 6ic weighl -.4402 (o 10) .Addilional weiShl --.1 1 oz '(Cylind6f

MXW Series Long Stroke Slide Table

37 Y 50 Y 50 11 43 209 Operating port Rc (PT) 1/8 Operation direction B Taper thread plug with hexagonal hole Operation direction B A 28 14 28 14 13 A 12 76 62 17 36 A 38 Z Cross section AA (scale 30%) (N-1) x H G H 9 N-M8 x 1.25 thread depth 16 8H9 +0.036 depth 9 0 Bottom through hole 6.6 F E 8H9 +0.036depth 9 0 Model J N H G F E Z MXW25-100 165 4 65 100 165 115 395 MXW25-125 180 5 60 90

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Type 01 Insert Plug TYPe Lead Wires After plugging in, pull lead wires taut to ensure that connection Hun to Renmte Jurction Cowr (Tgpe O 7 ) .Turn the knob O of Junction cover lD on the manifold block side by hand or slotted screwdriver in the C-O direction (closedlo open) 90 degrees. While holding the knob and upper part ofjunction cover, pull outward to remove it.

Electro-Pneumatic Positioner NIP600.NIP610

4 60 PSI (4kg|/cm') 6 90 PSI (6kglicm") lnput Current 0-4-20mADC(standard) . l 1 5 m A D C ' 2 2 1 0 m A D C ' 3 5 2 5 m A D C *4 10 50 mADC ' Special Order o ,,' Ogeration'/ Construction Model MmOO(Lever type) Single acting, Normal operation When the input current increass, the armature witt be subjected to a clockwise torque, pushing the flapper lever to the teft.

Electro-Pneumatic Valve NVEP/NVEF Series

5 1 l 3 = % =V2 0 1 0 3 NVEP 31 4 Size I Pressure Size Code PSIG (Kg7cm2) NPTF (Base mount type) 2 1 7-90 (0.s-5.5)O2=t/c 03=% 2 15-135 (1-9) 4 1 o.7 -22.5 (0.051.s) 03=% O4=th 06 =Vr Subplates (NVEF2120; NVEFII20; NVERI I20) Part No.

Compact Cylinder with Air Cushion and Lock Series RLQ

110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 90

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Note 7) The sensor unit is conformed to CE mark. 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 20 40 60 80 100 0 90 Fluid temperature [C] Series PF2D For Deionized Water and Chemicals Digital Flow Switch How to Order Remote Type Display Unit PF2D3 A 0 M 0 Unit specification Nil M With unit switching function Fixed SI unit Note 1) Output specifications Note 1) Fixed units: Real-time

Solid State Vacuum Regulator Series ITV2090/2091

vacuum pressure: 100kPa Flow rate characteristic measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) 10 Set point Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR)) 20 0.5 Output deviation (%F.S.) 30 Maximum flow rate: 132l/min (ANR) (with upstream VAC. pressure at 39kPa) Set pressure (kPa) 40 0 50 60 0.5 70 80 90

Self-seal Fittings Series KC

P. 76 KCT Use to branch connection of tubes of both side 90 direction. P. 78 KCL Union Y P. 76 KCU Use to branch connection of tubes in the same direction. 2 branched ports has a self-seal function. Check adaptor P. 77 KCJ Use to add the self-seal mechanism to a usual one-touch fittings, Series KQ. Bulkhead union P. 77 KCE Use to junction connection of tubes for installation of panel.

Compact Electro-pneumatic Regulator Series ITV0000

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8

Electric Actuators

0.02 Ground ball screw Corporation 1000 Yaskawa Electric 100W 0.05 Rolled ball screw Corporation Features 1 Simplified Selection Flow Chart Series LJ1/LG1 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Clean room Dust seal Deflection TSUBAKI 100 200 300 400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88 128 116 94 to 300 146 LJ1S202SC 90

5 Port Solenoid Valve SY Series

2 position 2 position 0.26 0.86 3.8 3.2 0.34 0.82 0.30 0.19 0.65 0.39 0.76 0.17 Double Double Closed center Closed center C6 C10 2.8 0.59 0.27 0.21 0.67 2.4 0.76 0.16 0.55 0.33 0.24 0.60 SY320 --C6 SY720 --C10 OneOne0.64 (0.42) 0.31 (0.36) 0.17 (0.11) 2.7 (2.0) 0.38 (0.38) 0.70 (0.56) Exhaust center Exhaust center 3 position 3 position touch fitting touch fitting 0.25 0.59 177 2.5 77 82 90

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

To prevent this, install an air dryer, after cooler etc.. 3 Thread M3 0.78 (3 to 5) M5 13 to 17.3 (15 to 20) Rc(PT)1/8 61 to 78 (70 to 90) If excessive carbon powder is present in the line, install a mist separator on the upstream side of the valve. 4 Rc(PT)1/4 104 to 121 (120 to 140) Piping to product When installing piping to a product, refer to operation manual to avoid mistakes. 5 Refer

5 Port Solenoid Valve Series SQ1000/2000

EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3, C4, C6 A, B port 43.5 58 P = 11.5 Dimensions Formulae L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (max. 16 stations) L n 1 67 84.5 112.5 123 2 78.5 96 125 135.5 3 90

5 Port Solenoid Valve, Series VQC

0.30 0.25 2-position single 26 or less 20 or less Metal seal VQC1500 0.70 0.72 0.15 0.16 0.25 0.18 Pressure center (A)( 4 B) 2 33 or less 25 or less Rubber seal VQC1501 0.85 0.65 0.20 0.21 0.42 0.18 Dual 3-port valve A B C Rubber seal VQC1 01 0.70 0.70 0.20 0.16 0.20 0.16 25 or less 33 or less 1 (P)(R2) 5 (R1) 3 2.0 Single VQC2100 Metal seal 2.6 0.15 0.46 0.15 0.60 22 or less 29 or less 90

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

: Built-in silencer Direct exhaust VV5Q21Side 5.4 (0.3) Rubber seal VQ1301 25 or less 33 or less VQ201 78 3.6 (0.2) VQ1400 Metal seal 20 or less 26 or less Exhaust center 5.4 (0.3) VQ1401 Rubber seal 25 or less 33 or less 3.6 (0.2) VQ1500 Metal seal 20 or less 26 or less Pressure center 5.4 (0.3) VQ1501 Rubber seal 25 or less 33 or less Metal seal 22 or less 14.4 (0.8) 29 or less VQ2100 90