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size Symbol Port size Symbol Symbol Standard characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" Basic diameter 4 6 8 10 12 19 3.18 4.75 6.35 9.53 12.7 19.05 25.4 3.18 O.D.

Power supply voltage 0 Current 4 to 20 mA {Sink tvoe} I Current 01o 20 mA (Sink tvDe) Voltaoe0to5VDC Voltaoe 0 to 10 VDC 4 Preset inout ' option Cable connector type Thread type Port size Bracket 1/8 (1000 type) 2 1/4 (1000. 2000. 3000 tvoe) 3/8 (2000. 3000 tvoe) 4 1i2 (3000 tvDe) Wilhout bracket B ' Flat bracket L-bracket * Oplion Option %wm * oplion Electro-pneumatic Resurator Series ITV

Do not attempt to rotate, as it does not turn Cable connection threads RC(PT) 1/4 Exhaust porl EXH (3) Port size 4-M5 x 0 8 thread depth 6mm Mounting hole 2-RC(PT) 1/4, 3/8 SUP port, OUT porl rTl|z000/3000 tleflru-Pltotllnalic Re[ula 0imeffiiolt$ ITV3OtrT Cable connector (4 wire) Cable connector (4 wire) . Do not anempt to rotate. as it does not turn.

Barb elbow Barb fitting Barb one-touch Reducer Port size M3 x 0.5 M5 x 0.8 Tubing size 3.2 4 Port size M3 x 0.5 M5 x 0.8 Fitting size 3.2 4 Piping for compact actuator Scale :100% Scale :100% Scale :100% Piping for compact pressure sensor 4 x 7 Scale :100% Sectional area 113.04mm2 4 75% Reduction 2 x 7 Sectional area 2 28.26mm2 Easy size reduction Reduction of the tubing size from standard

4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Applicable bore size SNJ-016C SNKJ-016C 10 16 C1 d C2 d B1 B2 H1 H2 14 17 16.2 19.6 4 4 7 8 8.1 9.2 3.2 4 M10 x 1.0 M12 x 1.0 M4 x 0.7 M5 x 0.8 The applicable mounting nuts are different from those for standard cylinders. 7 B CJ2W-Z Series 10-/1121-/22Double Rod Cylinder 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW Z 60 16 L W 2 J D C 10 B M9BW Z 60 16 L

4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

Network Bus In and Bus Out: M12 4-pin socket D-coded connectors 8.4.1. No. Designation Description 1 TD+ Transmit Data + 2 RD+ Receive Data + 3 TDTransmit Data 4 RDReceive Data Table 8-4 MPC Ethernet Cable Pin Signals The Ethernet MPC Uses a standard M12 industrial Ethernet cable. For cable selection see Accessories.

Hold/Clear HandheldSwitch HandheldPLCHold/Clear SwitchSI Hold/Clear -30No.EX-OML0010CN-C 4. 4. Clr Counter Value () -31No.EX-OML0010CN-C 5. 5. Parameter Default ( ) 6. 6. Clear Error Log -32No.EX-OML0010CN-C 4. Parameter Setting() 2. [4.Parameter Setting] Waring 1. 3. 4. 1. 34 2. 34 3. 35 4. 41 -33No.EX-OML0010CN-C 1. a) b) c) d) 2.

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

715 1,275 SC 235 425 760 1,370 2) 4 - 2. 2-1. 1. () 2. 3. 4. 2-2. . 2 L H L H (1) (2) (3) 3. 5 - 4. 5. 6. <> (1) (2) 2 7. 2-3. 1. 2. 3. 4. 5.

4 !6 !5 !4 Spring extend Spring return With auto switch !4 !5 !4 !6 Spring extend Spring return The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205). *BLUE links will lead to purchase pages. Seal Kit List Description Material Note No. Replacement Parts: Seal Kit Kit no. Contents Bore size (mm) !4 !5 !

Moreover, the residual voltage of the diode is approximately 1 V. 4-2-11

4 5 WA WB 2 2.5 XA XB 4 5 YC 7 7.5 +0.030 0 +0.030 0 +0.074 0 +0.074 0 +0.030 0 +0.030 0 52H9 65H9 4H9 5H9 7

(Panel mounting hole: See Dimensions.) 2 r o t c e n n o C h c n I c i r t e M 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K e u l B 2 3 / 5 3 0 P M D K 4 4 0 P M D K r o t c e n n o C g u l P d e R 4 / 1 7 0 P M D K 6 6 0 P M D K 6 1 / 5 9 0 P M D K 8 8 0 P M D K 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K r o t c e n n o c t e k c o S ) g n i k c a p h t i W ( e u l B 2 3 / 5 3 0 P M D K 4 4

Busy output is on while actuator homes. 4. Busy output turns off, and origin return outpul turns on. 5. Set point A input otf, and point A output turns otf. 3 Load 4 work pieces. 4 Move from home to point A (800 pulses) 1. Set bank 1 input on,2 & 3 off. 2. Set point A input on. 3. Busy output is on while actuator moves. 4. Busy output turns off; point A output turns on. 5.

Red LERR LED is flashing 1 3 4 1 2 Content Err (Default setting) 5 2.5 Mbps 625 kbps Content 5 Mbps CC-Link version Node number 2.00 2.00 2.00 2.00 1.10 1.10 1.10 1.10 64 1 : 8 7 9 6 Number of occupied nodes x10 x1 0 5 4 4 Pin number 1 Address 2 3 5 3 1 4 2 3 2 1 1 4 3 2 1 (2) (3) Content 8 7 9 6 6 Number of occupied nodes SI unit output data size 4 byte (Default setting) 0 5 4 1 2 3 Signal