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URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 DIN rail is prepared by customer. DIN rail is not suitable for port size F02 (G1/4).

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

[H_1] Hysteresis of OUT1 10 25 50 100 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 PFMB7501 [P_2] Set value of OUT2 100 250 500 1000 Accessory PFMB7102 0.5 to 0.7 Nm M4 screws (4 pcs.)

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Display upper 3 digits Accumulated value is reset Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2014 SMC Corporation All Rights Reserved PF-OMN0008-B

O O O 12 13 14 8 VN*-OMJ0001-B Revision history Renewal PU Renewal PX 1st printing : JW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved VN*-OMJ0001-B

Nut Shaft thread Nut (Rear surface) Washer Width across flats of the shaft and the nut, Tightening torque of nut (Nm) Groove for mounting the seal Valve size Shaft Nut Tightening torque 16 2.4mm 7mm 0.9 25 3mm 8mm 1.5 40 4mm 10mm 2.5 50 5mm 13mm 6.3 63 80 6mm 17mm 14 Securely mount the valve seal 2 into the seal mounting groove with caution not to damage the seal.

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

SUS316 FGE-KT001 NBR O FGE-KT002 FKM O V CY-24S SUS304/SWCH 001(FGESLA) 002(FGESLB) 003(FGESLC) FGE-CV SUS304 SUS304 M8X1.25XL30 SS400 M8X1.25 SS400 SS400 () 8/12 FGX-OM-L009-B 2 2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18 (L) 14

Basic Construction 16 O-ring NBR 15 Piston seal NBR 14 Rod seal NBR Oil-impregnated sintered 13 Bushing bearing 12.

Leakage due to deterioration of the rubber part. 7Troubleshooting 1 Reduction of the set pressure 3 Increased leakage from the bonnet breathing hole and exhaust port There is leakage from the ports other than the bonnet breathing hole and exhaust port. 8 8 Dimensions -12- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http

R 1/4 12-14 R 3/8 22-24 (Refer to tightening torque in the table on the right). R 1/2 28-30 Do not use a pipe wrench or pliers. They may break the R 3/4 28-30 R 1 36-38 product.

Warning Caution Connection thread Proper tightening torque ( ( ( (N m) Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/4 40 to 42 Rc1 1/2 48 to 50 Rc2 48 to 50 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 6.

If any of the troubleshooting is not applicable, please contact your SMC sales representative. 8 Dimensions -12- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation

(displayed alternately) Press S-key. displayed alternately 14 - Press and keys for 3 seconds or more. (press S-key to ) is displayed "Initialize" is executed, after 5 seconds. (Release keys till less than 5 seconds to ) Turning off for 1 second Returns to the state immediately after turning on the power supply.

With floating joint 15 Internal Construction and Parts List 16 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Recommended tightening torque [N-m] Piping Warnin Warnin Warnin Warning g g g Thread 1/4 Torque 12 to 14 Do not apply any additional twisting, or bending moments except for the weight of the filter regulator itself. Provide separate support for external piping, as damage may otherwise occur.

Width across torque (Nm) flats AS1002F-02 0.07 4.5 Installation AS1002F 0.2 7 AS2002F 0.3 9 Warning AS2052F 1 12 (1) Operation Manual AS3002F 2 14 Install and operate only after reading the operation manual carefully and understanding the contents. Keep the manual where is can be referred to if necessary.

Recommended tightening torque [N-m] Thread 1/4 Piping Warning Torque 12 to 14 Do not apply any additional twisting, or bending moments except for the weight of the filter regulator itself. Provide separate support for external piping, as damage may otherwise occur.

SeriesNCA1 Air Cylinder: Standard Type Double Acting, Single Rod Maintenance Parts 150 to 400 Construction 15 17 13 14 16 Seal Kit Parts List No. 13 14 15 16 17 Description Cushion Seal Rod Seal Piston Seal Cushion Valve Seal Cylinder Tube Gasket Material NBR NBR NBR NBR NBR Kit no.s can be found on the next two pages. *Call or email us at sales@smcpneumatics.com for request.

NCQ8B200-PS NCQ8B200-PS 200 (2") NCQ8B250-PS NCQ8B250-PS 250 (2 1/2") NCQ8B300-PS NCQ8B300-PS 300 (3") NCQ8B400-PS NCQ8B400-PS 400 (4") Construction Double Acting, Double Rod SeriesNCQ8W 15 13 14 Seal Kit Parts List No. 13 14 15 Description Piston Seal Rod Seal Tube Gasket Material NBR NBR NBR Repair Parts: Standard Seal Kit for Double Acting, Double Rod Remarks Bore size Kit no.