3 Port Solenoid Valve, VQ100 Series, Base Mounted Type AC coil: No more than 10% of the rated voltage. 2 Energizing in a long run For use of long run energizing, the continuous energizing time should not exceed 30 days and the valve must be operated at least once per 30 days.
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 12 Series XMH, XYH Stainless steel High Vacuum Angle/In-line Valve Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6-4.4 6-6.6 L2 XMH-16
Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.
NO.ZK2-OM00801-B // ZK2-ZSV-A A 2 9 10 11 14 14 15 16 16 17 17 20 20 20 F0 22 F1 OUT1 23 F2 OUT2 25 F3 27 F4 28 F6 30 F11 31 F80 32 F81 33 F90 34 F96 36 F98 37 F99 39 40 B 43 44 45 51 52 52 -1NO.ZK2-OM00801-B (ISO/IEC)(JIS)1)2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems.
In power saving mode 2, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode. (Power saving is only enabled in measurement mode). In power saving mode 2, a decimal point flashes and moves across the display.
-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1 1
In power saving mode 2, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode. (Power saving is only enabled in measurement mode). In power saving mode 2, a decimal point flashes and moves across the display.
ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.
ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5
V80 mA 1 V OUT1(NPN) DC12 24 V OUT2(NPN) DC(-) -43 43 43 43 NPN 1 + PNP 1 Max.30 V(NPN)80 mA 1 V NPN PNP DC(+) OUT1(NPN) DC12 24 V OUT2(PNP) DC(-) DC(+) OUT1(PNP) -65 65 65 65 PNP 1 Max.80 mA DC12 24 V N.C.
Please use caution and do not apply a stress of 30 N or greater. Failure to meet IP65 performance may result if using alternative connectors than those shown above, or when insufficiently tightened. Caution *Connector cable should be mounted in the correct direction.
For power supply and voltage other than standard ; Max. ambient temperature: 40°C ; Relative humidity 85% or less ; Applicable dryer: IDF1E to IDF15E-10, IDF22E-20/30, IDF37E-20/30, IDF55E-30, IDF75E-30, IDU3E-10 to 15E-10, IDU22E to 75E-30, IDF120D to 240D-3, IDF370B-603
For power supply and voltage other than standard ; Max. ambient temperature: 40°C ; Relative humidity 85% or less ; Applicable dryer: IDF1E to IDF15E-10, IDF22E-20/30, IDF37E-20/30, IDF55E-30, IDF75E-30, IDU3E-10 to 15E-10, IDU22E to 75E-30, IDF120D to 240D-3, IDF370B-603
, Inlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard, Cv: 0.09
)], Connections, Inlet: MV8 (1/2 Inch Face Seal, Male), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge Port, Inlet: 1 [-30 in.Hg to 100 psig (-0.1 to 0.7 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2 MPa)], Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material: PCTFE, Standard, Flow Specification: Standard
Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.
Note 6) The flow rate of the body ported product with a built-in silencer decreases by 30%.
(mm) or () Description/Series Bore size 10 12 16 20 25 32 40 50 63 80 100 Parallel style MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 Parallel style MHZL2 6.0 7.0 10.0 11.0 Wide type MHL2 7.0 8.0 8.5 10.5 11.0 12.5 Parallel style MHS2 (2 fingers) 6.5 7.0 7.5 8.5 Parallel style MHS3 (3 fingers)/MHS(L)3 6.5 7.0 7.5 8.0 Parallel style MHS4 (4 fingers) 6.5 7.0 7.5 8.5 Angular style MHC2 30 to 10 30
SS secondary remelt Electropolish + Passivation 35 0.24 Hastelloy C-22 316L SS 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) Elgiloy 316L SS 25 0.17 PTFE (Option: PCTFE) PTFE (Option: PCTFE, Vespel) 20 0.14 Dimensions inch (mm) 15 0.10 AP500 10 0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30
Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For