Compact Cylinder with Air Cushion and Lock Series RLQ

110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 90

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Note 7) The sensor unit is conformed to CE mark. 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 20 40 60 80 100 0 90 Fluid temperature [C] Series PF2D For Deionized Water and Chemicals Digital Flow Switch How to Order Remote Type Display Unit PF2D3 A 0 M 0 Unit specification Nil M With unit switching function Fixed SI unit Note 1) Output specifications Note 1) Fixed units: Real-time

Solid State Vacuum Regulator Series ITV2090/2091

vacuum pressure: 100kPa Flow rate characteristic measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) 10 Set point Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR)) 20 0.5 Output deviation (%F.S.) 30 Maximum flow rate: 132l/min (ANR) (with upstream VAC. pressure at 39kPa) Set pressure (kPa) 40 0 50 60 0.5 70 80 90

Self-seal Fittings Series KC

P. 76 KCT Use to branch connection of tubes of both side 90 direction. P. 78 KCL Union Y P. 76 KCU Use to branch connection of tubes in the same direction. 2 branched ports has a self-seal function. Check adaptor P. 77 KCJ Use to add the self-seal mechanism to a usual one-touch fittings, Series KQ. Bulkhead union P. 77 KCE Use to junction connection of tubes for installation of panel.

Compact Electro-pneumatic Regulator Series ITV0000

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8

Electric Actuators

0.02 Ground ball screw Corporation 1000 Yaskawa Electric 100W 0.05 Rolled ball screw Corporation Features 1 Simplified Selection Flow Chart Series LJ1/LG1 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Clean room Dust seal Deflection TSUBAKI 100 200 300 400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88 128 116 94 to 300 146 LJ1S202SC 90

5 Port Solenoid Valve SY Series

2 position 2 position 0.26 0.86 3.8 3.2 0.34 0.82 0.30 0.19 0.65 0.39 0.76 0.17 Double Double Closed center Closed center C6 C10 2.8 0.59 0.27 0.21 0.67 2.4 0.76 0.16 0.55 0.33 0.24 0.60 SY320 --C6 SY720 --C10 OneOne0.64 (0.42) 0.31 (0.36) 0.17 (0.11) 2.7 (2.0) 0.38 (0.38) 0.70 (0.56) Exhaust center Exhaust center 3 position 3 position touch fitting touch fitting 0.25 0.59 177 2.5 77 82 90

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

To prevent this, install an air dryer, after cooler etc.. 3 Thread M3 0.78 (3 to 5) M5 13 to 17.3 (15 to 20) Rc(PT)1/8 61 to 78 (70 to 90) If excessive carbon powder is present in the line, install a mist separator on the upstream side of the valve. 4 Rc(PT)1/4 104 to 121 (120 to 140) Piping to product When installing piping to a product, refer to operation manual to avoid mistakes. 5 Refer

5 Port Solenoid Valve Series SQ1000/2000

EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3, C4, C6 A, B port 43.5 58 P = 11.5 Dimensions Formulae L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (max. 16 stations) L n 1 67 84.5 112.5 123 2 78.5 96 125 135.5 3 90

5 Port Solenoid Valve, Series VQC

0.30 0.25 2-position single 26 or less 20 or less Metal seal VQC1500 0.70 0.72 0.15 0.16 0.25 0.18 Pressure center (A)( 4 B) 2 33 or less 25 or less Rubber seal VQC1501 0.85 0.65 0.20 0.21 0.42 0.18 Dual 3-port valve A B C Rubber seal VQC1 01 0.70 0.70 0.20 0.16 0.20 0.16 25 or less 33 or less 1 (P)(R2) 5 (R1) 3 2.0 Single VQC2100 Metal seal 2.6 0.15 0.46 0.15 0.60 22 or less 29 or less 90

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

: Built-in silencer Direct exhaust VV5Q21Side 5.4 (0.3) Rubber seal VQ1301 25 or less 33 or less VQ201 78 3.6 (0.2) VQ1400 Metal seal 20 or less 26 or less Exhaust center 5.4 (0.3) VQ1401 Rubber seal 25 or less 33 or less 3.6 (0.2) VQ1500 Metal seal 20 or less 26 or less Pressure center 5.4 (0.3) VQ1501 Rubber seal 25 or less 33 or less Metal seal 22 or less 14.4 (0.8) 29 or less VQ2100 90

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 1/2 22 45 90

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

3 Port Direct Operated Poppet Solenoid Valve SeriesVKF300 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Series VKF300 Compact with large flow rate Body width 18mm Cv0.25 (Standard: Base mounted type) Cv0.20 (Standard: Body ported type) Various manifold piping directions Output port: Manifold set-up allowing 360 rotation of 2(A) entry direction (in 90 increments) Types 20 and

Precision Clean Regulator Series SRP

ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101-M5 Conditions/Upstream pressure: 0.5MPa SRP1-M5 Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90

Vacuum Ejector with Solid State Timer, Series ZMA

adjusted without programming Models Standard supply pressure Nozzle diameter (mm) Diffuser construction Air consumption l/min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

M10 x 1 5 5 D C Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5 10 89.5 10 12.5 27 38.5 39 23 74.5 1.5 12 ZPT13F10-0-A10 13 Rc(PT)1/8 15 Width across flats 13 89 90

Magnet: D (Magnet), Mounting: B (Basic), Shaft Type: W [Double shaft (Long shaft key & Four chamfers)], Body Size: 100mm, Rotation Angle, Vane: 90D (Rotation Angle: 90; Vane Style: Double), Port Location: Side, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Rotary table w/external shock absorber, Four bore sizes available, High precision or basic type available, 90 and 180 rotation available, Auto switch capable, Rotary Table, ROTARY ACTUATOR, 1620 lb

Vacuum Ejector, VACUUM EJECTOR, 90 lb