XM, XY

Initial exhaust valve conductance (L/s) (viscous flow) Shows flow rate when P= 0.1 MPa 20 18 XMD/XYD-63 XMD/XYD-80 16 14 XMD/XYD-50 12 10 XMD/XYD-40 8 6 XMD/XYD-25 4 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.4 4.0 4.5 5.0 5.5 6.0 Adjustment nut rotations (n) 490 Stainless steel High Vacuum Angle/In-line Valve XMD, XYD Series Dimensions XMD/Angle type D C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange

08-mbb-e

Air Cylinder/With End Lock Series MBB Replacement Procedure is 32, 40, 50 63, 80, 100 P.284 Construction Locking at head end Manual release non-locking type: N Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Base Mounted Wiring: 40 (Non Plug-in Individual Lead Wire Entry), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (3/8), Thread: N (NPT)

Enclosure: W (IP67), SI Unit: QA (DeviceNetâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 16 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 18 (for 18 Stations; Longer Rail than Total Length of Specified Valve Stations

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P,E Port Location: D Side, A,B Port Size: KC6 (ø6 One-touch Fitting, Replaceable), Thread: N (NPT), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Model: 10S (Side Ported), SI Unit Specification: VA (CC-Link - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 8 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C12 (ø12 One-touch Fitting)

Compatible Robot: 051 (FANUC: CRX-5iA, CRX-10iA(L), CRX-20iA, CRX-25iA), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: N (without connector cable), Protective Cover: without protective cover, Manual Changer: F (without main plate assembly)

Style: Pressure Switch w/ L-Shaped Piping Adapter, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 03 (3/8), Set Pressure Range: 0.1 to 0.4 MPa, Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale), Lead Wire Length: Z (5m), Mounting Position: Right

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: KA (IO-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 6 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C8 (ø8 One-touch Fitting)

06-cba2-e

Air Cylinder/With End Lock Series CBA2 Replacement Procedure is 40, 50, 63 80, 100 P.284 Construction Head side end lock Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L.

06-cbm2-e

Air Cylinder/With End Lock Series CBM2 20, 25, 32, 40 Replacement Procedure is P.280 Construction Head end lock Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L.

IN20267

Figure 7-1 MPC Product Elements Drawing N o .

HEP500-04 Liquid Collector Ejector Type

Application Example HEP500 HEP500 HEP500 HEP500 Can be driven by an alreadyinstalled pump Tank P Machine Processed object Shavings Already-installed pumps can power these collectors. There is no need to provide a fresh source of energy.

Size: 20, Standard Dew Point: -20°C, Type: Standard, Thread: N (NPT), Port Size: 02 (1/4), Accessory: B (Bracket), Option: P (Fitting for Purge Air Exhaust)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 14 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C4 (ø4 One-touch Fitting)

Stations: 04 (4 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 7 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting)

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: EAN (Negative Common, PNP; EtherNet/IPâ„¢; 32 Outputs; M12 Connector), Wiring Type: All Double Wiring, Valve Stations: 12 (12 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: N (NPT)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP, Negative Common), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)