For Water, Oil, Steam, Air

N.O. 1/8 to 3/4 2 to 10

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

05-hyq-e

2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !2 !3 !2 !3 !2 !3 63 !2 !3 The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series HYQ. 63 63 63 Seal Kit List Description Material Note No. Seal Kit List Description Material Note No. o !0 11 o !0 11 Rod seal Rod seal (FKM can be selected.) (FKM can be selected.)

AMG

150 H 166 187 187 218 218 241 241 277 334 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 5.5 6 6 7 7 9 9 9 11 10 10 10 10 10 10 10 10 10 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 100 113 119 145 151 166 173 200 253 13 13 16 16 19 19 22 22 32 159 172 178 204 210 225 232 259 311 AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG150

JXCx-OMT0032CN

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

Rotary One-touch Fittings Series KS/KX

3 8 1 2 26 15.2 17 6 18.5 8 21.6 14.9 17 10 18.5 22 31.5 21 30.5 25.0 7 22 R(PT) 20.9 24 34 22 24 12 8 35.1 35.1 Reference dimensions after R(PT) thread installation.

EX510-GDN1.eng

temp. range -10 to 50 oC Higher-level bus Protocol DeviceNet Release 2.0 Group2 Only Server Slave type 2 4 MAC ID setting 0 to 63 Vender code: 7 (SMC Corp.)

ZMA

10 8 5 4 ZZMA Stations 04 ZQ 10 10 8 6 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration in each X, Y, Z direction for 2 hrs., whichever is smaller.

Hand Valve Series VH 1

VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 2 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

PF-OMN0011_C

() () UP SET DOWN OUT1OUT2 ON UP ON/OFF SET DOWN ON/OFF -12No.PF-OMN0011CN-C F F.S.(1~5V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] A 1-5V 1-5V 4-20mA (Hysteresis) ON OFF 90% () Ka (copy function) () 10 L/min 10 L Sa ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L ON-OFF 1 L/min ,10 11 12 1 L/min -13No.PF-OMN0011CN-C SI SI Ta ON-OFF Na ON 0 Ha -14No.PF-OMN0011CN-C M38 L(2 ) (ZS

ISE70/75/75H

(ISE75) (ISE75H) ZSP ISA2 For Air For Air 2-color 2-color digital IP67 IP67 IS (ISE70) digital ZSM PF2 2-color Display (green and red) Selectable from four patterns IF ON OFF Data (1) (2) (3) (4) green red red green red red green green Easily identifiable abnormal readings Easily identifiable abnormal readings 10 mm character height M12 Connector Lead wire with M12 connector (5m) Straight

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Smooth Vent Valve

1.3 x 10-10 P.526 XVD2-02S 522 Smooth Vent Valve (Supply Line) XVD Series RoHS How to Order 02 XVD 2 V Fitting type Smooth vent valve V S For VCR For Swagelok Space-saving Valve / needle valve integrated construction requires only 1/4 the piping space of previous models.

High Purity Fluoropolymer Needle Valve Series LVN 1

2 1 P0.01MPa P0.01MPa P0.01MPa 2 1 0.5 0 2 4 6 8 10 0 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part

PF-OMN0009_C

* , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12

Air Cylinder

Minimum Stroke for Auto Switch Mounting n: Number of auto switches [mm] Auto switch model Number of auto switches 32, 40, 45, 50, 56, 63, 67, 80, 85, 100 2 (Different surfaces, Same surface), 1 15 D-M9m D-M9mW n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1 10 D-M9mV D-M9mWV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel 304 AQ Release button color: Light blue Flow Rate and Effective Area ASV AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model AK 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

Self-seal Fittings Series KC

2) Weight (g) Applicable tube O.D.