Body Size: 2 (1/8, 1/4), Control Type: 1 (Meter-in), Thread Type: N (NPT), Port Size: 01 (1/8), Applicable Tubing O.D.: 07 (ø1/4), Seal Method: S (With Sealant), Option: D (General Environment, Brass Parts, Ni Plating)

Stations: 5 Stations, Port Size: N1 (1/8" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 1 (1.5m Cable 25 Pin), Option 1: DN (DIN Rail Mount & Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: N1 (1/8" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 1 (1.5m Cable 25 Pin), Option 1: DN (DIN Rail Mount & Name Plate)

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min;

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min;

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min;

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 1T (Out 1: Analog 1 to 5 V; Out 2: Flow Rate: None; Temp.: Analog 1 to 5 V; Temperature Sensor: Yes)

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min;

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 1T (Out 1: Analog 1 to 5 V; Out 2: Flow Rate: None; Temp.: Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Body Size: 20, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: Without Auto Drain, Pressure Gauge/Switch Option: Without Pressure Gauge, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Body Size 20: 1/8; Body Size 30 & 40: 1/4), Exhaust Mechanism: Relieving Type

Body Size: 20, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: Without Auto Drain, Pressure Gauge/Switch Option: G (Round type pressure gauge with limit indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Body Size 20: 1/8; Body Size 30 & 40: 1/4), Exhaust

10%201/4Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)145UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%201/4Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)145UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3020Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) ( C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) ( C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted

10%3020Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) ( C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) ( C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

10%(A)(A)Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)(kg)UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3020Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)