Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N7 (1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N7 (1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)
Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: 02 (Rc1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)
Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ΓΈ6), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%
0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%
0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%
0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%
specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]
0.050.5 or less150/30605 to 4090 or less (No condensation)220190 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%
specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]
ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]
ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]
ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]
ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]
0.050.5 or less150/30605 to 4090 or less (No condensation)185150 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4