Solid State Vacuum Regulator

(optional) 2-Rc 1/4 ATM port, OUT port 4-M x 0.8 thread depth 6mm through Mounting hole OUT 2 G 15 19 R3.5 n36 25 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc 1/4 ATM port, OUT port (7) 36 SMC Pneumatics, Inc.

α PneuAlpha HARDWARE MANUAL

HEAD OFFICE: 1-16-4, SHIMBASHI, MINATO-KU, TOKYO 105, JAPAN TELEPHONE: 03-3502-2740 FACSIMILE: 03-3508-2480

ZFC Series

size 5/32" Element Part Numbers 07 1/4" 09 5/16" Part No.

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Power Clamp Cylinder

4 Short head cap screw !5 Spring pin 40 CKZT-T040 Top cover kits Note 1) T = TURCK, P = P&F Note 2) Please specify the opening angle by the code in Table 1. 195 B Series CKZT Construction (50, 63, 80) t !3 !4 A-A A A u !0 o q e !2 y i w r !1 Table 1 Replaceable Kits List Contents Kit no.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 4) When ordering the body only, select the symbol from to respectively.

AFF

3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1 1 flange 0.38 0.55 0.9 1.4 2.1 4.2 10.5 50 52 72 87 Weight (kg) JIS Symbol Note) Max. flow is at 0.7 MPa.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Refer to page 14-20-4 for flow rate and page 14-20-4 for the max. flow line graph.

RZQ

RB RA W 4-O1 T Section a-a' Basic style (Through-hole): RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b' Section b-b' (mm) Bore size (mm) A B C D FB G H I J K L M N O1 O P Q RA RB RR RH T W E FA Z 32 100.5 82.5 14 22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5

06-cxwl-e

Pressure Control Equipment Industrial Filters 10 #5 #8 #4 #6 #7 #3 @4 @5 @6 @3 With end lock 16 @3 @6 @4 @5 #5 #8 #4 #6 #7 #3 With end lock 25 @3 @6 @5 @4 #5 #8 #4 #6 #7 #3 With end lock The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CXWL. *BLUE links will lead to purchase pages. Seal Kit List Description Material Note No.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 4) When ordering the body only, select the symbol from to respectively.

PSxx-OMG0001CN

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

PF2x7.eng

When setting, allow 7 digits or more between Set point 1 and Set point 2 (Set point 3 and Set point 4). 2: When Set point 1 = Set point 2 (Set point 3 = Set point 4), chattering may occur. Black 4 OUT1 U P Output mode (OUT1) Do not use the product for flammable or highly permeable fluids.

XL-OMY0002

XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

CM2x-OM0230Q

P4 2-1. 2-2. 2-3. 2-4. 2-5. 2-6. 2-7. 2-8. 3. P17 3-1. 3-2. 3-3. 4. (XC85,X446) P19 4-1. 4-2. PTFE 5. P20 6. P21 7.

CEP1

, , 4 ? , 2,3

CEx-OMQ0010

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.

LEJ-OM004xx

Contents Safety Instructions. 2 1.Outline of clean room specification. 4 1.1 Grease used . 4 1.2 Recommended tube diameter. 4 2.Raising dust characteristic . 4 2.1 Recommended tube diameter. 4 2.2 Amount of vacuum aspiration . 5 3.How to Order . 6 4.Construction. 7 1 11-LEJ Series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

So even slightly deformed or miss-alignment of component may lead operation failure of the product. (4) Return to origin cannot return while operating.

VZA2000

1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Single 0.54 0.19 2.2 0.56 0.23 2.4 Body side 2 position 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Double 0.54 0.19 2.2 0.56 0.23 Body side 2.4 M5 x 0.8 Sub-plate side 0.54 0.21 2.3 0.54 0.19 2.3 Closed center Body side 0.54 0.21 2.3 0.54 0.19 2.3 3 position Sub-plate side 0.52 0.22 2.2 0.52