VVXA21/22

The right side of the common port provides plug. 17-3-99 4 The VX series will be revised shortly.

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

Bernoulli Gripper

Body material ZNC 80 Nil 80 70 27.5 17 74 84 M5 x 0.8 10 17 2.5 20 2 8.5 1.0 8.3 12 3 5 1 5.8 15.2 1.0 193 P 119 S 568 *1 The stopper, vibration suppression cover, and plug weights are not included. 14 ZNC Series Specific Product Precautions 1 Be sure to read this before handling the products. Design / Selection Mounting 1.

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

DOC1003626

Analog output signal 2 Output Circulating fluid discharge temperature signal *4 11 Analog output signal 1 Output Circulating fluid discharge temperature signal *4 12 None Can not connect *3 13 None Can not connect *3 24 COM output (Common of contact input signal) 14 Output 15 Common of contact output signal 1, 2, 3, 4, 5 Output 16 Contact input signal 2 Input External switch signal *1 17

Dedicated Controller

RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed. Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)

PSE530/200

Auto shift function (P. 16-3-17) Allows stable switch output even when supply pressure changes.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

31.1 27.1 32.1 36.1 14.2 14.3 R 1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 35.4 29.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L3 L2 D1 L1 H T Max.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

13.2 12 4.3 7.8 13 16 53.4 7.6 17.2 49 47.6 17 22.5 12 16.1 17 21.5 24 7.8 16.2 16.4 AS2052FS-09 5/16" 15.2 13.5 57.2 8.5 18.1 49.9 48.5 19 18.4 AS3002FS-07 1/4" 13.2 12 4.5 8 16.6 20 59 9.8 21.7 55.7 54.3 21.8 25 12 20.5 17 24.5 28.5 9.3 19.2 23.6 AS3002FS-09 5/16" 15.2 13.5 65 19 26 AS3002FS-11 3/8" 18.5 16 69.8 21 38.1 AS4002FS-11 3/8" 18.5 16 4.3 8 18.8 26 76.9 11.3 23.7 64.3 62.7

Nozzle Type Ionizer

D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26

Multi-Axis Step Motor Controller

Lock (+) B-1 Lock () A-1 Sensor (+) B-3 Sensor () A-3 Red 4 Black 5 Brown 1 Blue 2 17

S Couplers

-03F Rc 3/8 40.4 35.8 19 KKA4P-02F Rc 1/4 43.4 36.1 17 -03F 1/4 Rc 3/8 6.9 26.4 18.9 44.4 40.2 19 -04F Rc 1/2 48.6 69.7 T KKA6P-03F Rc 3/8 48.7 84.1 24 -04F 1/2 Rc 1/2 10.0 54.2 20.4 52.9 79.7 -06F Rc 3/4 30 54.6 123.8 KKA7P-04F Rc 1/2 67.7 217.1 32 -06F 3/4 Rc 3/4 13.5 99.6 27.6 69.4 196.8 L2 H -10F Rc 1 72.4 325.9 L1 KKA8P-06F Rc 3/4 41 82.0 420.5 -10F 1 Rc 1 17.5 168.3 35.6 85.0 391.3

HRX-OM-W069

Analog output signal 2 Output CH2 Circulating fluid electric conductivity signal 1 11 Analog output signal 1 Output CH2 Circulating fluid discharge temperature signal 1 12 None Can not connect 13 None Can not connect 24 COM output (Common of contact input signal) 14 Output 15 Common of contact output signal 1, 2, 3, 4, 5 Output 16 Contact input signal 2 Input External switch signal 1 17

CRBB-OM00004

When the screw tightening torque is not specified, the tightening torque shall be approx. 0.49 Nm. 17 No.

ASR

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

Compact Hydraulic Cylinder Series CH
KGB

26 56 50 M39 x 4 45 21 106 17 146 3/8 36 15 36 Note) Body dimensions are the same with or without auto switches.

High Purity Fluoropolymer Needle Valve Series LVN 1

Body class Metric sizes Inch sizes LVC 4 6 8 10 12 1/8 3/16 1/4 3/8 1/2 2 LVA 3 LVH 4 Note) Refer to page 17-5-127 for information on changing tubing sizes. Basic size With reducer LVD LVQ Specific Product Precautions LQ Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and 17-5-138 to 17-5-139 for High Purity Chemical Valve Precautions.

Ejector Valve Unit Series ZYY/ZYX 1

(Crimping tool: Model DXT170-75-1) ZSE1-16, -17 ZSE1--16/-17 ZP Brown DC (+) OUT1 (white lead wire, red LED) can be set with pressure setting trimmer 1 (SET1). OUT2 (green lead wire, green LED) can be set with pressure setting trimmer 2 (SET2).

SMC has improved product performance and reliability with the redesigned SY series valve. The SY3000 and SY5000 have the same valve width as their predecessors, but the flow has been increased by up to 80%, allowing the valve size to be reduced. A built-in strainer in the pilot valve prevents trouble caused by foreign matter. By using H-NBR seal material for the main valve and seals, Ozone