Digital Flow Switches, Series PF2A, Series PF2W

directions for 2 hrs. each 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s, Rise time 1ns Resistance Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, based on 25C).

Digital Flow Switches

directions for 2 hrs. each 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s, Rise time 1ns Resistance Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, based on 25C).

PF2D

1 Digital Flow Switch For Deionized Water and Chemicals Series PF2D ZSE ISE PSE Body and sensor Body and sensor New PFA New PFA Z I SE3 PS Tube Tube Super PFA Super PFA Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Three types of flow range 0.4 to

REC

Lead wire length* (m) Load voltage Auto switch model Electrical entry Indicator Wiring (Output) 3 (L) 5 (Z) Applicable load Special function Style 0.5 () (N) AC DC P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P C76 IC circuit P P P P P p p p P p p p p p p p P P P P P P P P 3 wire (Equiv. to NPN) 5V Yes C73 100V 12V Relay PLC C80 IC circuit No 100V

REC

Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC Yes 24 V 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit Lead wire length symbols: 0.5 mNil 3 m L 5 m Z

RSQ

(Example) A73CL None Z (Example) A73CN Data Since there are other applicable auto switches than listed, refer to page 10-8-14 for details.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

G TF Coil scraper Nil Z None Yes Applicable Auto Switch: 20, 25, 32 Lead wire length (m) Load voltage Auto switch model Indicator light Applicable load Type Electrical entry Wiring (Output) Electrical entry direction Special function 0.5 (Nil) 3 (L) 5 (Z) AC DC Perpendicular In-line A90 A90V No 100 V or less 5 V, 12 V IC circuit Relay PLC 2-wire Reed switch Reed switch Solid state switch

Compact

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

CY1F

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static moment Ceiling mounting Horizontal mounting Wall mounting M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y

3 Port Solenoid Valve Metal Seal Series VZ200 1

-01 L: VZ2 5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7 Series VZ200 Manifold Specifications

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

stopper) Max. 10.5 (metal stopper) 2.4 Piping port 2-M3 x 0.5 Without magnet and switch rail 2 12 2-M2 x 0.4 depth 2.2 For rail mounting (mm) F Model H J M S Z AA 12 2-M2 x 0.4 depth 3 For magnet mounting MXP65 25 38 33.5 37 5 45 2 35 53 48.5 47 10 60 9.5 MXP6-10 8 Series MXP Dimensions MXP10 2-M3 x 0.5 depth 3 Z 3 With metal stopper 2-M3 x 0.5 depth 5 V K 5 4 G Max. 5.5 Max. 3.5 N 20 M

Square Tube Type Air Cylinder Series MB1

Port Cushion valve Bore size (mm) Double clevis type/(D) Z ZZ CDH10 32 40 50, 63 80, 100 160 164 190 238 170.5 175 205 261 Double clevis type U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5

ZSE30/ISE30

ZSE ISE PSE Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS Mounting ZSM Caution PF2 1.

7

Possible to mount magnetic field resistant auto switch in 3 directions [CKG1 series/Built-in standard magnet type] D-P3DWASC, D-P3DWASE, D-P3DWA/L/Z (AC magnetic field) D-P4DWSC, D-P4DWSE, D-P4DWL/Z (AC magnetic field) Magnetic field resistant auto switch [CKP1 series/Built-in strong magnet type] D-P79WSE, D-P74L/Z (DC/AC magnetic field) Switch mounting rod Auto switch mounting bracket CK1

7

1A VXD2 Z 3 0 A A VXK Enter standard product number.

MVGQ

Option With light/surge voltage suppressor Z (2) Note 1) Applicable to the grommet type only. Note 2) GZ, HZ are not available.

C85

+ Stroke C76 Band mounting type (B) or non-magnet Rail mounting type (A) ZZ + Stroke C85 C95 C85KN Non-rotating, Piston rod (Rubber cushion only) With rod boot CP95 Wh KK NCM C NCA e DKA K -X 9 Rod cross section 9 I f AM 20h (mm) Data KK BE EE N2 KW NA SW S KA KV ZZ Z G1 HR K XC RR G2 WA CD H9 D EW F WB H N1 U WH Bore C AM ND h8 4H9 8 M12 x 1.25 M5 x 0.8 M4 x 0.7 15 4.2 46 19 6 86 76 64

MHC2

around Z axis of attachment A part IA MHR kgm2 Inertial moment around Z axis of attachment B part IB m1 m2 r1 r2 Weight of attachment A part kg MHK Weight of attachment B part kg Distance between axes Z and Z1 mm MHS Distance between axes Z and Z2 mm MHC Limiting Range of Attachment Inertial Moment MHT MHC2-6D/MHCA2-6D MHY Finger opening and closing speed Allowable inertial moment of attachment

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

ZZ Z LH LS B C2 RR B LC LD LT LX LZ X Y Z ZZ FD FT FX FY FZ L U Z ZZ TD TT TX TY TZ CD CX CZ Front Rear Front Rear Front Rear Front Rear MY1 20 25 32 40 400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40

MHC2

around Z axis of attachment A part IA MHR kgm2 Inertial moment around Z axis of attachment B part IB m1 m2 r1 r2 Weight of attachment A part kg MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Weight of attachment B part kg Distance between axes Z and Z1 mm MHS