Rotary Actuator

CRQ2 +4 0 R o t a MSQ ti o 0 9 n y r a a w n y g e e k f of o MSZ k e e g y n R w a ot r a at n CRQ2X MSQX y o io 9 ti n 0 a ra t +4 0 n o g R e MRQ of k e y w a y 9 +4 0 0 Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

LJ1H

100 200 300 400 500 0 100 200 300 400 500 L1 Mep Stroke (mm) Stroke (mm) 0 2 4 6 8 10 When an actuator is operated under conditions that exceed the lines in the graphs above, be sure to use a regenerative absorption unit.

CL

0 0 0 85 95 110 140 162 170 190 212 51 58 58 71 72 110 110 120 62 74 90 110 130 164 184 204 9-3-14

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Air Cylinder Series CA2

0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 8 10 3.5 1.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 12.5 11.5 8.5 7.5 6 5 5.5 4 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 12 10 16 14 9.5 7.5 9 7 6 4 6.5 4.5 4.5 12.5 8 6 10 8 17.5 15.5 16.5 13.5 12.5 17.5 11 10 10.5 9 7.5 6.5 8 7 14 13 9.5 8.5 11.5 10.5 19 18 D-A9 and D-A9V types cannot be mounted on 50.

MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Thermo-con/Rack Mount Type

supply connector 104 242 379 429 63 Communication connector 0 247 226 206 191 149 148 0 24 0 24 Circulating fluid inlet Rc3/8 Circulating fluid outlet Rc3/8 0 59 326 1.

CM2

7 B 0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

MHZ2/MHZJ2

5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.5 0 +2.5 0 MHZ2

CXWM/CXWL

0 !1 !2 !3 !4 !5 !6 !7 !8 !

Electric Actuators

0 0 0 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 Work load [lb] Work load [lb] Work load [lb] Work load [lb] 0 50 100 150 200 250 300 200 0 50 100 150 200 250 300 200 Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] 160 160 L2 120 120 80 80 40 40 Horizontal mounting Wall mounting 0 0 0 0.44 0.88 0.32 1.76

Fieldbus system Digital unit

2 Output 4 2 3 0 V (Output) 24 V (Output) 4 Output 5 1 0 V (Output) 24 V (Output) 2 Output 6 3 3 0 V (Output) 24 V (Output) 4 Output 7 1 0 V (Output) 24 V (Output) 2 Output 8 4 3 0 V (Output) 24 V (Output) 4 Output 9 1 0 V (Output) 24 V (Output) 2 Output 10 5 3 0 V (Output) 24 V (Output) 4 Output 11 1 0 V (Output) 24 V (Output) 2 Output 12 6 3 0 V (Output) 24 V (Output) 4 Output 13 1 0 V

EXxx-OMU0020EN

Valve diagnostics 1 Table. 5-4 Valve diagnostics 1 Bit Description Explanation 0 Valve 0, 1 diagnostics 0: No error, 1: Short circuit 1 Valve 2, 3 diagnostics 0: No error, 1: Short circuit 2 Valve 4, 5 diagnostics 0: No error, 1: Short circuit 3 Valve 6, 7 diagnostics 0: No error, 1: Short circuit 4 Valve 8, 9 diagnostics 0: No error, 1: Short circuit 5 Valve 10, 11 diagnostics 0: No error

SI unit for DeviceNet TM

No.1 No.2 No.3 No.4 No.5 No.6 1 2 4 8 16 32 0 0 0 0 0 0 0 1 1 0 0 0 0 0 MAC ID 2 0 1 0 0 0 0 62 0 1 1 1 1 1 63 1 1 1 1 1 1 Communication speed setting (switches No. 7 to 8) Set the DeviceNetTM communication speed with a binary code of 125 kbps or 250 kbps or 500 kbps.

Digital Flow Switch

to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.

2 Phase Stepper Motor/Without Motor Brake Series LXS

depth 4 4H9 +0.030 0 depth 4 L-M6 Refer to Cross section C-C.

LEC-OM034xx

ID bit 3 2 1 0 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 5 0 1 0 1 45 - 13. Precautions for controlling the controller (LEC) 13. 1. Communication delay between the gateway unit unit and the controller(LEC) There is communication delay between the gateway unit and the controller (LEC).

Air Cylinder Series MB

E1 L1 E1 L1 MM NDH10 NX U1 NDH10 NZ R1 A A1 R1 U1 MM NX 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 30 40 50 65 65 100 20 22 28 40 40 46 I-03M I-04M I-05M I-08M I-10M I-12M Y-03MNote 1) +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

0.5

0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance