Low torque Metal seal type Rotary joint

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

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(mm) Model KQGL04-00 KQGL06-00 KQGL08-00 KQGL10-00 KQGL12-00 4 6 8 10 12 KQGH04-M5 KQGH04-01S KQGH06-M5 KQGH06-01S KQGH06-02S KQGH08-01S KQGH08-02S KQGH08-03S KQGH10-02S KQGH10-03S KQGH12-03S KQGH12-04S M5 4 R1/8 M5 6 R1/8 R1/4 Male Branch Tee Male Branch Tee R1/8 8 R1/4 Applicable tubing O.D.

Auto Switch Guide

MLU ML1C Auto switch mounting screw M5 x 0.8 x 16 l 1.

ZSE2/ISE2

Easy and simple wiring Connector type 16-6-7 2 Series ZSE2/ISE2 How to Order Operating pressure range/ Setting pressure range Piping specifications Single mounting R 1/8, M5 x 0.8 01 T1 Single mounting NPTF 1/8, M5 x 0.8 Nil L 0 to 1 MPa 0 to 100 kPa Note) M5 x 0.8 (female) thread.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

x 0.8 Thread depth 7.5 14 8-M5 x 0.8 thread depth 7.5 (same on reverse side) 4-Rc 1/8 thread depth 6.5 (piping port) (same on reverse side) 30 (Z) 15 6 13 8.5 Model S ZZ Z SS CXS25-10-XB19 10 106 82 CXS25-15-XB19 15 111 87 46 9 30 CXS25-20-XB19 20 116 92 CXS25-25-XB19 25 121 97 CXS25-30-XB19 30 126 102 (30) (Z) 2-M5 x 0.8 Thread depth 7.5 2-M8 x 1.25 Thread depth 12 CXS25-35-XB19 35 131

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GA NN MM Cover surface BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 32 40 32 40 Rod end threads Female threads Male threads Air 1.5MPa 1.0MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port Ambient and fluid temperature JIS class 2 +1.0 0 mm 0.035MPa 0.025MPa M5 x 0.8 M5 x 0.8 Without

MXH Series Compact Slide

50 20 20 6 50 98 60 25 6 25 60 108 60 6 30 30 35 MXH Series Compact Slide Dimensions 20 LT (mm) 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 3-M6 x 1.0 through Bottom hole dia. 5.1 6-9.3 counter bore depth 8 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32 7 6 20 20 11 6 15 NS

Series KC Self-seal Fittings

M5 Part No.

KB

X 0.8 M6 X 1 M5 X 0.8 M6 X 1 H (Hex.)

ZSE3/ISE3

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

: M5 x 0.8 0XY: M6 x 1.0 771

Low torque Metal seal type Rotary joint Series MQR

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

48

(M3, M5, and G threads) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

Compact Cylinder/Guide Rod Type Series CQM

x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 110L x 135L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 115L x 140L M6 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 120L x 145L 25 30 35 40 45 50 25 30 35 40 45 50 25 30

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

x 0.8 Vacuum pad connection port M5 x 0.8 ISG ZSM Connector type: ZSE2-0X-15C Indicator light (Red) 20 L H SET Vacuum supply port Vacuum pad connection port 7 35.6 Pressure setting trimmer Pneumatic circuit 600 (3000) + O 32 59 58 10.2 PV 6.5 18 V 8 10 17.6 10 5.5 2 x 3.3 Mounting hole Vacuum supply port M5 x 0.8 Vacuum pad connection port M5 x 0.8 783 Series ZSE2/ISE2 01 T1 Dimensions/Standard

Compact Guide Cylinder

(M3, M5 type only) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.