Size: 70D [7 m³/min (ANR)], Thread: N (NPT), Port Size: 14 (1 1/2), Option: J (Drain Guide, 3/8" Female Thread, 1.6 MPa)

EXxx-OMT0014_E

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2017 SMC Corporation All Rights Reserved. EX-OMT0014-A

EX9-OEx_PE.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012-2017 SMC Corporation All Rights Reserved. EX-OMV0014

PFMC.eng

M4 screws 2 OUT2/Analogue output/External input White 3 Blue DC(-) 4 Black OUT1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved PF-OMS0004

PFMV5.eng

URL http://www.smcworld.com Troubleshooting Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Refer to the SMC website (URL http://www.smcworld.com) for more information about troubleshooting.

PF3A7xxH.eng

Piping bore size: D URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 : The outputs will continue to operate during setting. : If a button operation is not performed for 30 seconds during the setting, the display will flash.

PF3A7xxH-L.eng

Piping bore size: D URL https://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 : The outputs will continue to operate during setting. : If a button operation is not performed for 3 seconds during the setting, the display will flash.

PF3A7xxH_eng

URL https://www.smcworld.com Retainer A Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 To change setting, refer to the operation manual from SMC website (URL https://www.smcworld.com) or contact SMC. : The outputs will continue to operate during setting. : If a button operation is not performed for 30 seconds during the

PF3A8xxH.eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Regulator Recessed part To change setting, refer to the operation manual from SMC website (URL https://www.smcworld.com) or contact SMC.

PF2A7H.eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

PF2x3.eng

Unlock Lock URL http://www.smcworld.com + 2 sec. or longer Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 1: Operate only the product with unit selction function (Model indication: without M). 2: Operate only the PF2A3 series. 3: Depend on the setting of switch operation in initialize mode. 4: Displayed in turn.

PF3W7.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Rev.A Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009-2011 SMC Corporation All Rights Reserved 4. Press the button to finish the setting.

PF3W7x-X445.eng

Mode display Peak hold temperature set value Bottom hold temperature set value Fluid temperature Accumulated value is displayed (Power value is displayed) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 With the temperature sensor The set values and accumulated output of OUT2 cannot be displayed

IBV-OMY0015

Pressurizing the air blow discharge port may result in the breakage of the product. 10 Revision history A: Specification and Notes added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation

VN-OMP0001

External pilot Bleed port External pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3 (VNH (VNH (VNH (VNH ) ) ) ) VNH13 3 5MPa 7 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / (VNC (VNC (VNC (VNC ) ) ) ) /30m /30m 0.49MPa 0.97MPa ,MPa ,MPa m/s m/s Vm/s Ql/min dmm 8 VN-OMP0001 9 VN-OMP0001 Revision history 1st printing:PT 4-14

VN-OMT0001

( ) 4 VN-OMT0001 VND VND VND VND / / / / 1.5~2 1) 2) 3) 30 1 1) 2)1 0.1MPa 3)0.1MPa Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 2830 Rc1 3638 Rc1 1/4 4042 2 2 2 2 Rc1 1/2 4850 Rc2 4850 5 VN-OMT0001 VND / / / / 12(P1) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) VND0D VND02D 12(P1) 10(P2) 1mm 12(P1) 10(P2) 2(B) 1(A) 6 VN-OMT0001 No. 7 VN-OMT0001 : TT 4-14

LV20-OMY0005

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: N (NPT), Port Size: 02 (1/4), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 08 (ø8), Seal: S (with Sealant)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: N (NPT), Port Size: 01 (1/8), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 08 (ø8), Seal: S (with Sealant)

Model Type: Standard, Piping: E (Compression Fitting), Port Size: 14 [1 1/2" (40A)], Port Thread: R (Rc)