AS

AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle

AS

AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations 485

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

pins) Connector entry direction Note Symbol Note Symbol Stations Stations 1: Perpendicular connector 2: Lateral connector 02 02 2 stations 2 stations Double wiring Double wiring LOCK FREE FREE 08 04 8 stations 4 stations LOCK 02 02 2 stations 2 stations Specified layout (Up to 16 solenoids possible) Specified layout (Up to 8 solenoids possible) 16 08 16 stations 8 stations Note 1) Double

5 Port Solenoid Valve Series SZ3000 Plug-in Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

ribbon cable connector (10 pins) Connector entry direction Note Symbol 02 Note Symbol 02 Stations Stations 1: Perpendicular connector 2: Lateral connector 2 stations 2 stations Double wiring specifications Double wiring specifications LOCK FREE LOCK FREE 08 02 04 02 8 stations 4 stations 2 stations 2 stations Specified layout (Up to 16 solenoids possible) Specified layout (Up to 8 solenoids

Soft Start-up Valve AV2000/3000/4000/5000

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

Thermo-chiller

Tap Water (as Facility Water) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Make-up water 2. Operation and suspension frequency should not exceed 10 times per day. Frequently switching between operation and suspension may result in the malfunction of the refrigeration circuit.

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

AMR3000 to 6000

E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR300-02 to 03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.) 8 3 standard standard standard Pressure switch 1 2 E2 E3 E4 E6 E10 None With pressure

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

For the IR400-02/03/04□□: IR3000-02/03/04□□-A
For the IR401-02/03/04□□: IR3010-02/03/04□□-A
For the IR402-02/03/04□□: IR3020-02/03/04□□-A
For the IR412-02/03/04□□: IR3120-02/03/04□□ (IR-A series air operated regulators will be available at a later date.)
Note) Select option “H” when panel mounting the product.

HRX-OM-Z002

Tap water : Standard of The Japan Refrigeration and Air Conditioning Industry Association(JRA GL-02-1994) Deionized water : Electric conductance 0.4 S/cm or higher (Electrical resistivity 2.5Mcm or lower) (Note2) (1)Facility water temp. : 32, (2)Circulating fluidTap water, (3)Circulating fluid temp. : CH1:20/CH2:25, (4)Circulating fluid rated flow:Rated flow, (5)Power supply200 VAC.

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

AR425 to 935

VY1 How to Order G PPA Internal pilot operated relieving type regulator AR 25 4 BG R 02 Option Nil Flow direction: Right Left AL None Regulator R Body size Accessory 4 6 8 9 1 2 1 Symbol Description Applicable model Port size 1 Nil 1 4 02 03 04 06 10 12 14 20 2 1 With bracket AR45 to 65 AR25 AR35 B 8 3 2 G46-10-02 G46-2-02 Gauge 1 2 3 4 G Regulating pressure range Pressure gauges are shipped

ITV

IITV20 02 5 Example AV Valve stations Electro-pneumatic regulator Blanking plate assembly ITV1030-311S-X26 2 2 stations P398020-13 AU 8 8 stations Electro-pneumatic regulator LOCK UNLOCK RESET SET AF ITV2050-212S-X26 E SMC REGULATOR OUT port size ITV1000/2000 P 02 03 1/4 3/8 LOCK UNLOCK RESET SET MPa AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

pa

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread type Nil T Automatically operated type built-in pulsation attenuator Rc NPTF G NPT FLUID OUT AIR SUP 2 F N AIR EXH FLUID IN T, F, N are options.

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.