High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

EX510-GMJ1.eng

input and controling GW 24 VDC GW unit 4 2 3 7 8 Accessory No.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

PSE540/560

ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

Compact

Lead wire should be less than 100 meters. 4.

Vacuum Pad

35 4 3 3 Dimensions Dimensions Part no.

REC

4 4.5 5 D-H7/H7W/ D-H7NF/H7BAL HS HS HS HS HS 20 2024.5 27 62 72 27.5 7 8.5 9 10 D-H7C 25 27 29.5 64.5 74.5 30 8 9 9 9 D-A3/D-A44 9 10 9 10 Data 4 4 4.5 5 D-G39/D-K39 D-G5NTL Since this is a guideline including hysteresis, not meant to be guaranteed.

Compact Cylinder

4 Carbon steel CQ2B32-PS 32 to 63 Hard chrome plated Aluminum alloy CQ2B40-PS 20 to 40 Anodized Collar 4 Aluminum alloy casted CQ2B50-PS 50, 63 Painted after chromated Snap ring Carbon tool steel CQ2B63-PS Phosphate coated 5 Bumper A Urethane 6 Seal kit includes !2, !3, !4. Order the seal kit, based on each bore size.

Rotary Table

screw 2 22 Seal washer 2 21 Parallel pin 1 20 Hexagon socket head set bolt 4 6pcs. for size 3, 7 19 Round head Philips screw No.0 4 Round head Philips screw High precision type 18 4 Round head Philips screw Size : 7 Round head Philips screw No.0 Size : 1 to 3 17 Special bearing 1 High precision type Deep groove ball bearing Basic type 16 Deep groove ball bearing 1 15 Piston seal 4 14 Wearing

LECA6_C

11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18

AN

105.6 3 4 514 97.5 60 41 2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56 22 19 2511-003 17.2 3 8 Note) NPT thread is also available.

IR1000/2000/3000

Note 4) Air is normally being discharged to the atmosphere.

MRQ

4 !5 !6 !7 !8 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

24 22 9 59 68 15 76 40 29 55 MXP12-15B 42 40 29 89 98 25 106 60 49 75 MXP12-25B 12 Series MXP Dimensions MXP16 Z 3 With metal stopper 2-M5 x 0.8 depth 8 V K 6.5 5 M G Max. 4 Max. 4 11 25 2-M4 x 0.7 depth 6 Stroke: S MXP16-20 Width across flats 3 Width across flats 8 Piping port A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6 x 1 4-M5 x 0.8 depth 7 Prepared hole

Pneumatic Transfer System Series MF

Description Qty. 1 Description Track Guide spacer Eccentric bearing holder Adjustment gear Snap ring Detent fitting No. 1 No. 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 Aluminum alloy Spring steel Special resin Stainless steel Stainless steel Stainless steel Stainless steel Hard anodized 4 8 2 2 2 2 10 4 4 2 4 4 4 2 2 2 2 2 2 4 2 2 2 8 4 Cylinder

Ｍ agnet Gripper Unit for Collaborative Robots

List of included items .4 2. Parts description of Magnet gripper .5 3. Product Specifications .6 3-1. How to order .6 3-2. Specifications .7 3-3. Gripping force .8 3-4. Dimensions .10 3-5. Connector and pin layout . 11 3-6. Center of gravity .12 4.Product Specifications .13 4-1.Magnet Gripper .13 4-2. 3-port solenoid valve .14 4-3.

PSxx-OMU0002CN

7 2)4 (1 11 7 ) ON OUT1OUT2 4 0,10,50,100,500,1000,5000 ms IP40 AC1000 V 1 50 M(DC500 V ) -550 -1060 () 3585RH() UL/CSA(E216656)CE(EMC RoHS ) 2 m 1(0 ms) 2 3MPa/kPa 490% 5 -76No.PS-OMU0002CN-D M5 01 N01 C4H C6H N7H C4L C6L N7L M5X0.8 R1/8 NPT1/8 4 mm 6 mm 1/4 inch 5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36

PSxx-OML0002CN

AC1000 V 1 50 M (DC500 V ) 2F.S.(25 ) 3 3.52 m 4 0.15 mm 2(AWG26) 1.0 mm CEUL/CSARoHS 1 2 3 -56No.PS-OML0002CN-G 01 N01 C4H C6H N7H C4L C6L N7L R1/8 M50.8 NPT1/8 M50.8 4 mm 5/32 inch 6 mm 1/4 inch 4 mm 5/32 inch 6 mm 1/4 inch C3602 () ) O HNBR PBTPOMSUS304C3604() O HNBR/NBR (3 2 m) 81 g 70 g 71 g 73 g 75 g 73 g 75 g (4 2 m) 85 g 74 g 75 g 77 g 79 g 77 g 79 g 43 g 32 g 33 g 35

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

4 !8 !

ARJ1020F

6 (Metric size) 5/32", 1/4" (Inch size) 14-4-9 7 Series ARJ310 Precautions Be sure to read before handling.