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ARM11AB1-319-1

Handle Position: Front, Piping: IN/OUT: Bottom, Stations: 3 Stations, Fitting: IN: Elbow Ø6, OUT: Elbow Ø4, Accessory: w/o PressureGauge,Common SUP Block,L Side, Option: 0.35MPa, Unit: -, Digital Pressure Switch Output Specifications: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000015863/?HissuCode=ARM11AB1-319-1

XGT221-32222-1

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGT221-32222-1

XGT221-46236-1

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGT221-46236-1

XGT224-46236-1

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGT224-46236-1

XGT311-50336-1

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGT311-50336-1

XGT222-32222-1

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGT222-32222-1

XGT222-46236-1

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGT222-46236-1

XGT223-46236-1

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGT223-46236-1

XGT312-50336-1

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGT312-50336-1

XGT313-50336-1

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGT313-50336-1

XGTP313-50336-1

Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGTP313-50336-1

XGTP311-50336-1

Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGTP311-50336-1

XGTP312-50336-1

Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000162969/?HissuCode=XGTP312-50336-1

AR30K-03-1

Size: 3/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: None, Option 1: 0.02~0.2MPa Setting, Option 2: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000015829/?HissuCode=AR30K-03-1

AR30K-03B-1

Size: 3/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: Bracket, Option 1: 0.02~0.2MPa Setting, Option 2: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000015829/?HissuCode=AR30K-03B-1

AR30K-03BE-1

Size: 3/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: B+E, Option 1: 0.02~0.2MPa Setting, Option 2: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000015829/?HissuCode=AR30K-03BE-1

AR30K-03BG-1

Size: 3/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: B+G, Option 1: 0.02~0.2MPa Setting, Option 2: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000015829/?HissuCode=AR30K-03BG-1

AR30K-03E-1

Size: 3/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: Square Recessed Pressure Gauge, Option 1: 0.02~0.2MPa Setting, Option 2: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000015829/?HissuCode=AR30K-03E-1

AR40-F04G-1

Size: 1/2, Reverse Flow: Regulator, Standard, Thread: G, Port Size: 1/2, Accessory: Round Pressure Gauge, Option 1: 0.02~0.2MPa Setting, Option 2: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000015829/?HissuCode=AR40-F04G-1

AR40-06-1

Size: 1/2, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 3/4, Accessory: None, Option 1: 0.02~0.2MPa Setting, Option 2: -

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000015829/?HissuCode=AR40-06-1