Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 11 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 12 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44