Compact Cylinder High Magnetic Field Design CDQ2BP Series

4.4482 tbl lbl tbf Flow rate SCFMx28.57=Nl/min Cv1.0 = Kv 0.856 gf kgf N Flow rate Numinx0.035=SCFM Key SCFM = Std. cubic feet per minute psi = pounds per square inch kPa = kilopascals atm = almospheres J = joule MJ = megajoule pm = micron (micrometer) mm = millimeter cm = centimeter m = meter mils = 0.001 inch in = inch ft = foot @ = cubic centimeter L = liter gal (U.S.) = U.S. gallon g

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type FZ Microspeed cylinder Bore size 20 25 32 40 Number of auto switches Port thread type Nil TN TF 20mm 25mm 32mm 40mm Rc NPT G Nil S n 2 pcs. 1 pc.

Low Maintenance Filter Series FN1

1/4 q q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

S Couplers Series KKH

Dimensions/Socket (S) Male thread type A2 A1 T D H L1 L2 (mm) A1 A2 Effective area mm L2 Body size H Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7

3 Way Direct Acting NVKF 300 Series

Stations Applicable blank plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) (

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D . D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

(g) Dimensions In.

High Power Cylinder Series RHC

Nil S n B L F G Basic type Axial foot type Front flange type Rear flange type Bore size Auto switch type 20 25 32 40 50 63 80 100 20mm 25mm 32mm 40mm 50mm 63mm 80mm 100mm Without auto switch Nil Select applicable auto switches from the table below. Cylinder stroke Refer to the stroke table on page 2.

Sine Rodless Cylinder Series REA

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

Sine Rodless Cylinder Series REBR Direct Mount Type

Operating direction Operating direction B Operating direction A A K W HB HB HC X Piping port P (plug) Operating direction A Piping port P (plug) Operating direction B N H HA Y T CB 8-MM thread depth M HT HP 4-counter bore B Counter bore depth C HP L 4-J Effective thread length E TC X F WP WP GW GP QW PW D 4-LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G

High Precision Digital Pressure Switch with 2-color Display Series PSE300/540∗

Pressure Sensor for Air 3.2 g Weight 3.2 g Series PSE54 (M3 type not including lead wire weight) 9.6 20.818 mm Sensing head g size d 9.6 20.818 mm 18 9.6 High Precision Digital Pressure Switch with 2-color Display 20.8 Scale:100% Pressure Sensor Controller 1ms Response speed 1ms Set pressure resolution 1/1000 1/1000 Series PSE300 Series PSE300/540 Coming out in Can be mounted in close proximity

Solid State Vacuum Regulator Series ITV2090/2091

optional) 2-Rc 1/4 ATM port, OUT port 4-M x 0.8 thread depth 6mm through Mounting hole OUT 2 G 15 19 R3.5 25 7 36 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc 1/4 ATM port, OUT port (7) 36 3

5 Port Solenoid Valve, Series VQ2000/Sub-plate Single Type

Thread type Nil RC N NPT T NPTF Enclosure F G Dustproof Nil IP65 (dusttight/splash proof) W Note) Note) Valve specifications are IP65.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

Large Type Vacuum Unit Series ZR

DC: 1W type (with light: 1.05W) S With surge voltage suppressor Nil AC type Electrical entry DC: 0.45W type (with light: 0.5W) Y Nil Air operated For 24, 12, 6, 5, 3 VDC L Lead wire length 0.3m LN Without lead wire Solenoid valve rated voltage Plug connector type LO Without connector Nil Air operated M Lead wire length 0.3m 5 24VDC MN Without lead wire 6 12VDC MO Without connector V 6VDC G

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: Straight, Bracket Option: B (Bracket)

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

IDX-OM-W026

42010 47010 73010 83010 55010 72010 R1 R11/2 R2 mm 10 1 2 kg 54 62 100 116 kW 22 37 55 75 1ANR 2065% 2 3 30mA 4() 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDF Series 6-1 6 1 IDX-OM-W026 6 6-3 IDF22E, IDF37E Guige Guige ( 10) Guige (10) (820) 17 4-13 (17) [] mm A B C D E F G H J K L

IDX-OM-W014

] 10 (:1.9m) (17) :0.8m mm A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 IDU4E Rc1/2 13 483 31 568 470 270 3001 80 2402 15 32 230 802 355 422 IDU6E Rc3/4 15 485 IDU Series 6-3 6 3 IDX-OM-W014 6 6-4 IDU3E4E AC100/100,110 (50/60Hz) CM 1 2 ILS FM PTC OLR PC 1 PTC PTC ILS CM AC200/200 (50/60Hz) AC230V (50Hz) PRS AC200/200,220 (50/60Hz) OLR C01 2 2 1 L C11 N TB