10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

The SGH is available in both external pilot solenoid and air operated types, and has CE accreditation.2-port external pilot solenoid valve , Pressure range: 0 to 7MPa , Port sizes: 3/8, 1/2, 3/4, 1 (depending on series) , Available threads: Rc, G (ISO1179-1), NPT, NPTF , Seals: NBR or FKM, COOLANT VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, KA, VNA/B/C/D BODY PT >3/4NPT, 5.95248 lb

The SGH is available in both external pilot solenoid and air operated types, and has CE accreditation.2-port air operated coolant valve, Pressure range: 0 to 7MPa, Port size: 3/8, 1/2, 3/4, 1 (depending on series), Available threads: Rc, G (ISO1179-1), NPT, NPTF, Seal material: NBR or FKM, COOLANT VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, KA, VNA/B/C/D BODY PT >3/4NPT, 3.60087 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, PROCESS VALVE, 1 1/2 AIR OPER, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 8.71072 lb

and air operated types, and has CE accreditation.2-port air operated coolant valve, Pressure range: 0 to 7MPa, Port size: 3/8, 1/2, 3/4, 1 (depending on series), Available threads: Rc, G (ISO1179-1), NPT, NPTF, Seal material: NBR or FKM, COOLANT VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, GA, VNA/B/C/D BODY PT 3/8NPT, 2.8606 lb

Process valve series VNC, Air operated type, Orifice size: 7mm to 80mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, COOLANT VALVE 1/2 PT, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, JA, VNA/B/C/D BODY PT 1/2, 1.14977 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, PROCESS VALVE 1/2 PT, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, JA, VNA/B/C/D BODY PT 1/2, 1.22473 lb

and air operated types, and has CE accreditation.2-port external pilot solenoid valve , Pressure range: 0 to 7MPa , Port sizes: 3/8, 1/2, 3/4, 1 (depending on series) , Available threads: Rc, G (ISO1179-1), NPT, NPTF , Seals: NBR or FKM, COOLANT VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, LA, VNA/B/C/D BODY PT >3/4, 4.00507 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, PROCESS VALVE, 1 1/2 PT, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1C, VNA/B/C/D, 7.87473 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, PROCESS VALVE, 1 1/2, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 8.43453 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, PROCESS VALVE, 1/2 PT, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, JC, VNA/B/C/D BODY PT 1/2, 1.19916 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, VNA/B/C/D BODY PT 1/2, VALVE, VNA/B/C/D BODY PT 1/2, 1.19006 lb

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, VALVE, PROCESS 1/2 PT, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, JA, VNA/B/C/D BODY PT 1/2, 1.22709 lb

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)