Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.
Series CG1 NCM Series CG1 Stopper bracket Stopper Width across flats MA Series CM2 Bore size (mm) 20 25 32 40 50 63 MH 38 41 41 47 60 60 MI 16.2 19.7 19.7 27.8 37 37 ML 18 18 18 22 28 28 MT 9 11 11 11 11 13 S 77 77 79 87 102 102 ZZ 150 158 160 184 220 220 MA 14 17 17 24 32 32 NCA D-X JIS Symbol Series CG1 S + Stroke Stroke MH + Stroke + Adjustment ML + Adjustment (A) B Series CA2 20ZZ + 2
1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.
DDH10 (Hole) Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z Part no. 40 CA2-B04 +0.058 0 57 35 65 15 85 10 9 17 40 52 165 11 8 60 10 50 CA2-B05 +0.070 0 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 63 +0.070 0 CA2-B06 67 40 80 25 105 12.5 11 22 50 66 196 13.5 10 85 16 80 +0.084 0 CA2-B08 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 100 +0.084 0 CA2-B10 93 60 16.5 100 35.5
11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3 40(R)-L-01 3 4 5 M plug connector (M): 10-SY3 40(R)-M-01 3 4 5 M8 connector (WO): 10-SY3 40(R)-WO-01 3 4 5 Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 66.5 34 41.4 115.3 60 97.5 [101.9] 117.1 [121.5] 42.3 [44.5] 20.5 11 11 20.5 11 20.5 11 11 11 32.5 [34.7] 27.5 7.5 16.5
-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.
(mm) T U Y V Without lock With lock F G W X Z W X Z 25 15 to 100 92 1 26.5 40 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 32 20 to 100 118 1 34 60 80 120 14 120 160 14 2 4 105 to 500 63 50 to 200 146 4 32.2 60 98.5 138.5 12.5 (13.5)138.5 178.5 12.5 (13.5) 4 8 205 to 500 505 to 800 L lead Motor left side parallel type: LEY L 25 32 63 Motor right side parallel type: LEY R 25 32 63 U S1 U S1
page 12 for dimensions. 200, 220, 230, 240 VAC (50 Hz), 200 to 260V (60 Hz) 2 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 380, 400, 415 VAC (50 Hz), 380 to 420V (60 Hz) 3 Compound 420, 440, 480 VAC (50 Hz), 420 to 520V (60 Hz) 4 Please refer to page 11 for dimensions.
207 M16 x 1.5 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 233 30 27 22.4 9 19 60 228 M20 x 1.5 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 258 35 32 28 11 24 70 248 M24 x 1.5 0.030 0.076 0.2 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 297 45 42 35.5 13 30 80 282 M30 x 1.5 0.030 0.076 0.036 0.090 0.23 0.3 0.18 100 100 80 65 M48 x 1.5 75 72 56 16 50 115 327 60 57 45 15 41 100 312 M39
Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 522 Electric Actuator/Slider Type Ball Screw Drive 11-LEFS Series AC Servo Motor Clean Room Specication Specifications 11-LEFS25, 32, 40 AC Servo Motor Model 11-LEFS25S2 6 11-LEFS32S3 7 11-LEFS40S4 8 Stroke [mm] Note 1) 50 to 600 50 to 800 150 to 1000 Work load [kg] Note 2) Horizontal 20 20 40 45 50 60 Vertical 8 15 10 20 15 30 LEF Up
(Refer to page 6-3-60.) Standard stroke (mm) Same as the standard. (Refer to page 6-3-60.)
60 75 75 75 242 269 288 336 365 437.5 456 494 11 11 11 11 11 16 16 18.5 16 19 23 28 36 35 40 45 244 273 296 347 381 443.5 465 509 16.5 16.0 16.0 18.0 18.0 40 40 40 8 11 11 13 16 8 0 0 0 0 59 66 66 80 81 133 133 141 6 7 7 11 11 15 15 17 51 58 58 71 72 110 110 120 14 18 18 22 26 31 31 36 30 35 40 48 58 65 75 80 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5
60, 70, 80, 90, 100 Weight/( ): Denotes the values with D-A93.
-D IS10L-40-m02-D IS10L-40-m03-D IS10L-40-m04-D IS10L-60-m04-D IS10L-60-m06-D IS10L-60-m10-D Pressure switch with L-shaped piping adapter*5, *6 IS10L-20-m01-D IS10L-20-m02-D IS10L-50-m04-D IS10L-50-m06-D p. 56 IS10E-40-m02-D IS10E-40-m03-D IS10E-40-m04-D IS10E-40-m06-D IS10E-60-m06-D IS10E-60-m10-D IS10E-60-m12-D IS10E-60-m14-D IS10E-20-m01-D IS10E-20-m02-D IS10E-20-m03-D IS10E-30-m02-D IS10E
point L (mm) Gripping point L (mm) Internal Grip MHZJ2-10D/11-MHZ2-10D MHZAJ2, MHZJ2, 11-MHZ2 Pressure 0.7 MPa Pressure 0.7 MPa 25 0.6 MPa 0.6 MPa 20 Gripping force (N) 0.5 MPa 0.5 MPa 15 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa
MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20 0.2 MPa 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) 0.5 MPa
Temp. rise C (Rated voltage) 5 50 3.5 45 6 55 7.5 55 6 45 8.5 60 11 60 9.5 50 11.5 60 Power consumption W (Holding) Apparent power VA Frequency Hz Model Power Inrush Holding 50 20 11 60 17 7 50 42 18 60 37 12 50 55 22 60 47 18 Application Example AC VX31 Style N.C. (VX31) N.O. (VX31) C.O.
30 45 60 50 60 80 (2000 [mm/s2]) 10 23 35 30 55 70 40 60 80 60 70 90 Vertical (3000 [mm/s2]) 2 4 8 8 16 30 11 22 43 13 27 53 Pushing force [N]*2 *3 *4 14 to 38 27 to 74 51 to 141 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 132 to 283 266 to 553 562 to 1058 Actuator specifications Speed [mm/s]*4 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 24 to 500 12 to 300