Table of Contents

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

MXS

10 Shock absorber at retraction end MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 11 21 31 31 26 32 32 32 Shock absorber at extension end A Stroke 75 to 125 CV/MVG A Max. 25 CXW CXS Shock absorber at retraction end CXT MX * Other dimensions not indicated are the same as the basic style.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

7.5 8 45 50 19 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 16 22 M16 x 1.5 30 26 3/8 5 43 112 11 10 9 50 63 21 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 16 25 M18 x 1.5 30 26 3/8 5 47 116 11 12 10 55 80 26 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 19 29 M22 x 1.5 35 30 1/2 5 57 127 11 16 13 65 100 34 38 6.5 118 90 35.5 35 27 19 16 M12 x 1.75 27 21 34 M27 x 2 35 32 1/2 8 66 137 12 20 16 80 125 34

Table of Contents

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

ZPT/ZPX

63 B10 63 M10 x 1.5 80 B12 80 M12 x 1.75 100 100 125 125 B01 Vacuum entry Pad type Rc 1/8 HB Large bellows pad Material N NBR S Silicon rubber U Urethane rubber F Fluoro rubber E EPR 13-11-91 10 Series ZPX ZPX HB-B01-B (Female thread) 40 50 ZPX HB-B01-B (Female thread) 65 80 Rc 1/8 I I Rc 1/8 Hexagon width across flats 21 11 Hexagon width across flats 21 11 Width across flats 37 4-M4

Air Cylinder Series MB

66.5 71.5 66.5 70.5 67.5 125 76.5 115 68.5 72 65 72 65 65 Operating range (mm) Auto Switch type Bore size 32 40 50 63 80 100 125 D-Z7, Z80 13 10 17 7.5 8.5 7.5 9.5 9.5 10.5 D-A5, A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Without magnet, Auto Switches: Without

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 60mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: R (Axial Direction)

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 75mm

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 30mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: R (Axial Direction)

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 45mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: R (Axial Direction)

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 75mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: R (Axial Direction)

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 100mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 75mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 15mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 45mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: R (Axial Direction), Version: Z

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 15mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: R (Axial Direction)

Clean Series: 11 (Vacuum Suction Type), Magnet: None, Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 15mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: R (Axial Direction), Version: Z