ZP

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Table of Contents

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3240(R)-L-01 M8 connector (WO): 10-SY3240(R)-WO-01 M plug connector (M): 10-SY3240(R)-M-01 108.6 [113] Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 79 89 [93.4] 20.5 11 11 20.5 11 92 106.8 20.5 11 11 11 7.5 16.5 7.5 16.5 24.5 7.5 16.5 24.5 24.5 50 Note) Refer to page 176

C76

D-H7NF Bore A B A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.

C76

Bore size Stroke NCA Standard stroke (mm) Bore size (mm) 32 40 Max. stroke (mm) 200 250 32 40 10, 25, 40, 50, 80, 100, 125, 160, 200, 250 C76F40A C76F32A Flange, Foot (1 pc.) DFlange, Foot (2 pcs. with mounting nut 1 pc.)

C95

12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22 30 35 40 50 31 35 45 50 60 70 15 18 20 23 27 30 51 54 65 67 86 96 32 36

CY1

, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000 40 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 50 6000 63 Note) Contact SMC if the maximum stroke will be exceeded.

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

ZP

-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

REA/REB

st: , 251 to 100 st: , 1001 st or longer: Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300

REA/REB

: Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900,

CQ2

11 20 77 116 134 53.5 80 73.5 53.5 43.5 M12 X 1.75 18 100 117 11 11 22 94 136 154 53.5 100 85 63 43.5 M12 X 1.75 22 Refer to p.2.3-18 for rod end nut and optional brackets.

V100

Ground 4-7-11 12 Series VT317 How to Use DIN Terminal 1.

LEY-OM007

300 150 200 250 300 30 50 100 350 400 450 500 50 100 350 400 450 500 LEY25 LEY16 LEY32 LEY32 LEY25 LEY16 / P.38 6.3 <> NPNPNP LEY16B-100 NPN -11- 2.3. 28 28 29 30 29 30 / 14 14 15 15 25 26 27 25 26 27 11 11 12 12 19 19 21 21 18 18 16 16 22 22 24 24 17 17 12 13 12 13 23 23 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6

7ND9071en

CSA C22.2 No. 0-M91, CSA C22.2 No. 94-M91, CSA C22.2 No. 142-M1987, CSA C22.2 No. 157-92, CSA C22.2 No. 213-M1987, CSA C22.2 No. 60079-0:11, CSA C22.2 No. 60079-11:11, CSA C22.2 No. 60079-15:12, CSA C22.2 No. 60529:05, ANSI/ISA 60079-0: 2009, ANSI/ISA 60079-11: 2012, ANSI/ISA 60079-15: 2012, FM 3600 November 1998, FM 3610 October 1999, FM 3611 October 1999, FM 3810-2005, ANSI/ NEMA 250:1991

JXCx-OMU0004

CCW [CCW] 11() 2 22 =() 34 48 11() 3 22 =() 34 48 * 10.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 16 32 VQZ 17 4 VQD 10 4 10 P = 11 L2 36.5 41.5 L1 45 M plug connector (M) D side U side Stations 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P = 11 L plug connector (L) Dimensions n: Stations n L 11

5

11 11 D-A59W 13 13 13 14 14 15 D-A3m/A44 9 9 10 11 11 11 D-Y59m/Y69m D-Y7P/Y7mV D-Y7mW/Y7mWV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5m/J59 D-F5mW/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 DValues which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and

Table of Contents

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

Booster Regulator/Air Tank

150 500 250 250 824 846 (mm) A 531 570 494 527 B 444 479.8 444 479.8 C 3/8 1/2 3/8 1/2 D Note) 519 543 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.