Table of Contents

50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Modular Design with Uniform Body Style

45 50 m28 51 m27.8 61.5 Optional specifications Bracket mount Panel mount M N Q R S T U V W Y Z AR20-D 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 AR40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50-D 70 75 66 11 22 113 3.2 AR60-D 70 75 66 11 22 113 3.2 Model *1 The dimension of B is the length

CM2

53 11 11 16 10 24 14 7 21 22 41 8 46.5 M14 x 1.5 21.5 42.5 M32 x 2 44.5 1/4 32 Dimensions by Stroke Boss-cut Style Built-in One-touch Fittings Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ ZZ S S ZZ Bore size (mm) 20 25 32 40 Bore size (mm) Bore size (mm) ZZ ZZ ZZ ZZ ZZ Q P 20 20 191 137

JIS Standard Hydraulic Cylinder

NA MA K F Air release S + Stroke H + Stroke A SS FT ZZ + 2 strokes (mm) Stroke range (mm) Bore size (mm) C B FT FY FD F J FX FZ GA M NA R T P S SS 32 25 to 800 40 88 109 21 M10 x 1.25 37 136 30 11 11 11 11 3/8 16 38 58 39 0.13 0.18 40 25 to 800 46 95 118 21 M10 x 1.25 36 136 30 11 11 11 11 3/8 45 12 65 42 0.2 50 25 to 800 58 115 145 27 M10 x 1.25 43 150 30 13 11 13 14 1/2 15 52 76 46 0.15

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Proposals for Energy Saving

S S Effective area ratio 3.2 : 1 Pressure loss: Small Filter regulator S coupler Coil tube 2 Nozzle 2 Upstream side S: 9 Nozzle side S: 2.8 Effective area (mm) Effective area ratio Nozzle size (mm) Number of nozzles Supply pressure S: S = 3.2 : 1 2 1 0.5MPa 0.35MPa 0.33MPa Regulator pressure Outlet pressure Effect of Energy Saving Improvement 50 to 75% Reduction 50 to 75% Reduction 100%

LEC-OM02704CN

20 50 20 9 15 9 (2) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0003 () PB27 CDS 50 pulse PB28 CDT 100 ms (b) CDS [pulse] 0 pulse CDS CDT100ms 100 4.0 10.0 4.0 10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 9 16 10 10 .2 10.1

42

Port size 02 1/4 03 3/8 Porting specifications Nil Side ported B Bottom ported Note) Note) For bottom ported, port size is 1/4 only. 451 VQ4000 Series Dimensions: Plug-in Type Conduit terminal 2-position single: VQ410 -l 0 1 2 156 50 23.5 23.5 2 50 90 106 156 Indicator light 11 (12.5) 11 (12.5) 5 3 4(A) port 2(B) port 9 11 4 2 48 38 1 10.5 A B 38 24.6 48 4 2 A 13.5 13.5 2 x 5.6 Mounting hole

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

smcmaintenancepartslist

6 Single acting, spring return Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Gasket Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Electric Actuators

s) Time (s) LXFH5BD LXPB2BD/LXSH2BD LXPB5BD/LXSH5BD 80 80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load Transfer load 10kg 10kg Transfer load 50 50 50 3kg 6kg 6kg 2kg 3kg 3kg 1kg 0kg 0kg 0kg 0.01 0.02 0.03 0.04 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0 Time (s) Time (s) Time (s) Acceleration Time Guide/Ball Screw Specification (Vertical) Caution LXPB2BC/LXSH2BC LXPB5BC/LXSH5BC Transfer

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

ratio: 75% LEC S 5000 5000 Duty ratio: 50% LEC SS-T The value of 50% or less is the same as duty ratio 50% 0 1 2 3 4 5 0 0 0 2.5 5 7.5 10 LEC Y LEC Y Work load [kg] Work load [kg] Motorless LAT LEJS40B LEJS63B LZ 20 20 Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] LC3F2 Duty ratio: 50% Duty ratio: 25% 15000 15000 10 10 Duty ratio: 100% Duty ratio: 100%

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S T CD LH LT LX LW X1 Y1 SS Z e f Q 32 M10 x 1.25 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 15 40 19 11 43 35 1/2 46 155

CNA

to 1000 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) l KA M MM N P Q H S T V W ZZ d e f h ZZ K 40 50 63 80 100 40 50 63 80 100 1/4 stroke 6 14 11 M14 x 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 215 52 43 15 59 223 20 to 800 7 18 11 M18 x 1.5 30 3/8 42 to 44.5 58 168 44 11 0 237 58 52 15 66 245 1/4 stroke 20 to 1000 7 18 14 M18 x 1.5 31 3/8 50 to 51.5 58 182 52.5 12 0 254 58

CNA

30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37 to 39.5 51 153 37.5 9 8 215 20 to 500 43 11.2 59 1/4 stroke 223 M14 x 1.5 1/4 stroke 11 30 3/8 42 to 44.5 58 168 44 11 0 237 20 to 600 52 11.2 66 245 M18 x 1.5 14 31 3/8 50 to 51.5 58 182

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Table of Contents

Port size: 1/8, 1/4 50 173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)

Series SV

050 Cable length (l) Connector specifications 1m (3.24ft) 5m (16.2ft) Straight Angle 010 050 S A M12 M12 6 6 28.3 18 30 5 50 l 31.3 14.9 30 5 34 50 48 l 5 1 2 1 2 5 4 3 4 3 Socket connector pin arrangement Socket connector pin arrangement Terminal no.

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.