CL

11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40 45 50 65 75 85 100 106 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) LS LT LX LY MM N S W X YA P YB H ZZ e f h ZZ 13 13 16 16 17 20 30 25 l 1

MGP

, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5 25 53.5 37.5 11.5 M6 X 1.0 M6 X 1.0 Rc1/8 12.5 13.5 28.5 MGF WA WB Bore (mm) Q R S T U VA VB X XA XB YY YL Z 30st 30st< 100st 300st< 30st 30st< 100st 23 24 28 34 100st< 200st 200 200 200 200 200st<

0.4

Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

SV

L Dimension n: Stations L n 2 148 137.5 116.3 16 63 3 160.5 150 126.8 17 73.5 4 160.5 150 137.3 11.5 84 5 173 162.5 147.8 12.5 94.5 6 185.5 175 158.3 13.5 105 7 198 187.5 168.8 14.5 115.5 8 210.5 200 179.3 15.5 126 9 223 212.5 189.8 16.5 136.5 10 235.5 225 200.3 17.5 147 11 235.5 225 210.8 12.5 157.5 12 248 237.5 221.3 13.5 168 13 260.5 250 231.8 14.5 178.5 14 273 262.5 242.3 15.5 189 15

MGG

(mm) Stroke range (mm) Bore size (mm) AP AK AL AJ AI N AH M AG L AB K AA J I V B U T O P S A 20 25 32 40 50 75, 100, 125, 150, 200 25 6.6 9 95 82 45 125 25 112 80 11 60 12 55 30 48 108 82 12 99 M6 x 1 depth 9 Rc 1/8 26 30 9 9 108 92 54 150 35 134 100 13 70 16 65 35 57 130 100 109 M6 x 1 depth 13 Rc 1/8 13 31 75, 100 125, 150 200, 250 300 35 9 9 118 102 60 150 35 134 106 16 80 16 73 40 65

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

MNB

9 46.5 1/4 120.5 32 Up to 600 75 77 20 19 35 27 40 14 12 52 18 63 68 119.5 16.5 135 115 11 9 56.5 1/4 134.5 32 Up to 600 90 92 20 23 35 27 45 14 12 62 18 80 81 150 19 153 126 13 12 72 1/4 169 37 Up to 750 102 100 25 33 40 32 45 20 16 63 22 100 96 170 19 178 150 16 14 89 1/4 189 37 Up to 750 116 120 30 37.5 40 41 55 20 16 75 26 Bore size (mm) T V VA W ZZ S GR GE GF J K MM N P Q H GL GL1 32

MNB

100 9 46.5 1/4 120.5 32 Up to 600 75 77 20 19 35 27 40 14 12 52 18 63 119.5 16.5 68 135 11 115 56.5 9 1/4 134.5 32 Up to 600 90 92 20 23 35 27 45 14 12 62 18 80 150 19 81 153 13 72 12 126 1/4 169 Up to 750 37 102 100 25 33 40 32 45 20 16 63 22 100 96 170 19 178 16 14 150 89 1/4 189 Up to 750 37 116 120 30 37.5 40 41 55 20 16 75 26 Bore size (mm) T V VA W ZZ S GR GE GF J K MM N P Q H GL GL1

LEC-OM02704CN

39.0 23.8 5.2 B 12.7 A B C D E F 10126-3000PE 10326-52A0-008 25.8 37.2 14.0 10.0 12.0 31.3 AWG2430 11 4 11 (2) SCR(3M()) 36210-0100PL 36310-3200-008 39.5 34.8 22.4 11.0 11 5 12 12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 16 32 VQZ 17 4 VQD 10 4 10 P = 11 L2 36.5 41.5 L1 45 M plug connector (M) D side U side Stations 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P = 11 L plug connector (L) Dimensions n: Stations n L 11

CY1

Note 2) CY1S and CY1L with standard specifications are capable of a maximum piston speed of 1000mm/s. Symbol (mm) 11 Helical insert screw specifications -X168 P HTB Model HTA Aperture dia.

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

+ Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32

CXS

V = up to 100mm/s V = up to 300mm/s 20 40 60 80 100 0.05 Overhang L (mm) Weight m (kg) Graph V = over 400mm/s; up to 10mm 11 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang L (mm) 25 Graph up to 50mm 9 0.1 20 0.05 V = up to 100mm/s V = up to 300mm/s 0.05 0.04 15 0.03 10 Weight m (kg) 0 0.01 20 40 60 80 100 Overhang L (mm) 0.02 Graph V = up to 400mm/s; up to

JIS Standard Hydraulic Cylinder

J FX FZ GA M NA R T P S SS 32 25 to 800 40 88 109 21 M10 x 1.25 37 136 30 11 11 11 11 3/8 16 38 58 39 0.13 0.18 40 25 to 800 46 95 118 21 M10 x 1.25 36 136 30 11 11 11 11 3/8 45 12 65 42 0.2 50 25 to 800 58 115 145 27 M10 x 1.25 43 150 30 13 11 13 14 1/2 15 52 76 46 0.15 63 25 to 800 65 132 165 27 M12 x 1.5 14 43 156 35 15 18 15 15 1/2 90 63 52 0.2 80 25 to 1000 87 155 190 22 M16 x 1.5 44

Table of Contents

50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

smcmaintenancepartslist

6 Single acting, spring return Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Gasket Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

MXQ

Table (4) Maximum Allowable Moment: Mmax (Nm) 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) 20 Model 10 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Series: LEFG (Guide), Size: 25, Mounting Pitch: S [Ball Screw Drive, Step Motor/Servo Motor (24 VDC)/AC Servo Motor], Stroke, mm: 150