MLGP

V = 400 mm/s (10) Over 30 Stroke V = 400 mm/s 1 5 CL CL1 0.5 MLGC 25 Load weight m (kg) Load weight m (kg) CNG 25 MNB CNA 20 CNS 20 CLS 1 CLQ MLGP 0.1 10 50 100 200 0.7 10 50 100 200 RLQ Eccentric distance l1 (mm) Eccentric distance l1 (mm) MLU MLGPL32 to 100 ML1C (12) Over 50 Stroke V = 400 mm/s (11) 50 Stroke or Less V = 400 mm/s D100 50 100 -X 100 2080 80 Data 10 63 63 Load weight m (

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100

Compact

. 600 0.51000(0.4 + 0.4) 1000 LEC = T1: Acceleration time [s] Time until reaching the set speed LEC S = 0.2 [s] T1 = V/a1 [s] T3 = V/a2 [s] T4 = 0.3 [s] T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed LEC

Environment

600 LEC Speed [mm/s] Speed [mm/s] LEC S For Servo Motor (24 VDC) LECA6 LEC SS-T LEC Y Horizontal Vertical LEY25Am LEY25m Motorless 40 15 LAT Lead 3: LEY25AC Horizontal work load [kg] Lead 3: LEY25C Vertical work load [kg] 30 11 LZ 10 LC3F2 20 Lead 6: LEY25AB Lead 6: LEY25B 15 5 10 Lead 12: LEY25AA Lead 12: LEY25A 7 2 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed

CL

11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40 45 50 65 75 85 100 106 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) LS LT LX LY MM N S W X YA P YB H ZZ e f h ZZ 13 13 16 16 17 20 30 25 l 1

Compact 5-Port Solenoid Valve

Cylinder speed [mm/s] Cylinder speed [mm/s] Refer to pages 9 to 12 for detailed conditions regarding the above cylinder speeds.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

actuation VZS VZ314--01 (Piping: 4 x 1 m) VFS VS4 VQ7 Speed controller/Silencer AS2301F-01-04/AN110-01 EVS 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700

15

20 0.01 CY1H 100 400 250 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Piston speed [mm/s] CY1F M2 M1, M3 [Graph 13] Allowable moment [Graph 11] Allowable moment CYP 200 200 100 100 Moment M1, M3 [Nm] Moment M2 [Nm] D CY1S25-Z CY1S25-Z E F D10 10 -X 5 5 100 400 250 100 400 350 Technical Data Piston speed [mm/s] Piston speed [mm/s] 1495 CY1S Series Calculation of Guide Load Factor Calculation

C85

-25 6-11-25 25 Series C85 Construction [First angle projection] Single acting, Single rod Spring return: C858 to 16-S (Disassembly is not possible.) !

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

1

Series CG1 NCM Series CG1 Stopper bracket Stopper Width across flats MA Series CM2 Bore size (mm) 20 25 32 40 50 63 MH 38 41 41 47 60 60 MI 16.2 19.7 19.7 27.8 37 37 ML 18 18 18 22 28 28 MT 9 11 11 11 11 13 S 77 77 79 87 102 102 ZZ 150 158 160 184 220 220 MA 14 17 17 24 32 32 NCA D-X JIS Symbol Series CG1 S + Stroke Stroke MH + Stroke + Adjustment ML + Adjustment (A) B Series CA2 20ZZ + 2

NCA1

/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 5/8 1/2-13 2 1/16 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 1 3/8 1-14 1 5/8 4.7 2 1 1/2 6-15-25 25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA

NCA1

/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 5/8 1/2-13 2 1/16 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 1 3/8 1-14 1 5/8 4.7 2 1 1/2 6-15-25 25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA

TABLE OF CONTENTS

Body Brass Body S. S.

MNB

/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 100 80 200 200 50 40 50 100 100 63 Load weight: m(kg) Load weight: m(kg) 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP

XL

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

High Vacuum Angle Valve, XL Series

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

Table of Contents

P . 15-11-3 15-9-2 2 Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS How to Order 2 2 0 01 06 S AS 1F Nil Option Body size 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N If more than one option is required, write option part numbers in the order of S, K, N.

Environment

300 400 500 600 700 800 900 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] Servo Motor (24 VDC) The following graph shows the values when moving force is 250%.

CNG

Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) 1000 1000 Maximum speed: V (mm/s) 9-5-7 8 Cylinder with Lock Double Acting, Single Rod Series CNG